Features
SEMI 300mm communication standard compliance is no longer an optional
feature. 300mm semiconductor factories require equipment suppliers to
fulfill the standards in order to implement factory automation. This
challenges equipment suppliers to provide communication functionality
to comply with evolving standards as well as fab specific scenarios
while meeting demanding delivery dates. Fortunately, the Cimetrix
CIM300 product family provides a flexible software architecture and a
full complement of software modules that enable quick SEMI standards
implementation, including E4, E5, E30, E37, E39, E40, E87, E90, E94,
and E116. In addition, Cimetrix demonstrates the commitment to maintain
continual involvement in the standards process to ensure its products
evolve in step with the standards and fab specific scenarios. This
enables equipment suppliers to confidently select Cimetrix as a
committed partner who will stand by their side during tool acceptance
at semiconductor factories.
Since entering the semiconductor automation market in 1999, Cimetrix
has quickly become the leading provider of software products that
comply with the demanding requirements of 300mm factory automation. The
CIM300 product strategy provides solutions that implement all
requirements published in the SEMI 300mm communication standards and
that conform to the SEMATECH and Selete base of functional requirements
and scenarios. Cimetrix tests against both the SEMATECH and CCS testing
scenarios and implements appropriate recovery functionality. CIM300
achieves maximum flexibility by implementing each SEMI standard as a
separate software module with optional dependencies on other modules.
Customers can purchase the modules as individual software products or
together as an integrated solution. As the standards and scenarios
further mature and new standards emerge, CIM300 will continue to
provide compliance to the pertinent SEMI standards.
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