The CIMPortal software development kit provides a comprehensive equipment data acquisition (EDA) solution for equipment manufacturers as well as for integrated device manufacturing (IDM) retrofitting existing equipment. Once an equipment model is created and the data collection is integrated into CIMPortal, multiple modules can simultaneously access the equipment model data at the same time. The CIMPortal Interface A module, CIMWeb, is 100% compliant to the SEMI Interface A standards. The CIMPortal DB module, CIMStore, supports collecting data into a MySQL database and even enables conformance to the JEITA TDI specification. CIMPortal Bundle includes both CIMWeb and CIMStore to simultaneously support Interface A and local database storage.

Industry experts declared that Advanced Process Control (APC) is a key to decreasing operational costs, increasing informational flow rates, and enabling technological advances. APC disciplines such as Run-to-Run Control (R2R or RtR), Statistical Process Control (SPC), and Fault Detection and Classification (FDC) all require a robust equipment data acquisition framework. Traditional solutions have been implemented using the SEMI SECS/GEM standards or other proprietary solutions. Industry experts developed the Interface A standards to establish that robust framework for the future in order to facilitate data acquisition integration and improve data quality. The resulting Interface A SEMI standards, E120, E125, E132 and E134, were approved in October, 2004. Fabs will use Interface A for APC data gathering and e-diagnostics while the existing SECS/GEM interface will remain intact for MES connectivity. Correct Interface A implementations will have a significant impact on the equipment manufacturer's software architecture to enable full access to necessary data as requested by the International SEMATECH Manufacturing Initiative (ISMI). CIMPortal provides complete Interface A functionality, accommodates different software and hardware architectures, and establishes a fundamentally correct framework that complies with ISMI guidelines. Integrate CIMPortal directly within the equipment supplier's tool controller as an embedded solution, or install CIMPortal on a stand-alone Windows PC.

In order to satisfy many semiconductor manufacturer specifications, many equipment suppliers must implement and comply with both Interface A and implement local data storage such as outlined in the JEITA Tool Data Interface (TDI) functional specification. TDI is a developing specification that provides guidelines and requirements for equipment suppliers to store and manage a local database with historical equipment data; unlike Interface A which focuses on providing live data. The historical data is primarily for the local EEQA and EEQM software to use for product quality enhancement, yet the historical data will also become available directly to the IC Makers through Interface B1--typically ODBC. CIMPortal's architecture provides an excellent foundation to support both Interface A and TDI at the same time. All of the data available through CIMPortal's High Speed Output Interface is available to Interface A clients and for storage in the TDI database.

CIMPortal can gather data directly from multiple sources, unify the data within a single Equipment Model, and deliver the unified data seamlessly into a single Interface A implementation and other modules. CIMPortal uses Data Collection Interface Modules (DCIMs) to gather data and receive events, exceptions, and traces from different sources throughout the tool. As an example, one equipment might be configured with four DCIMs at the same time to query and receive Interface A information directly from a SECS/GEM interface, sensors, a SQL Server database, and the equipment's tool control application. All of the different data sources are integrated into one E125 compliant Equipment Model. A DCIM can even transfer data into the EDA implementation from another computer-including non-Windows platforms. Furthermore, DCIMs can be added and/or configured after deployment to accommodate add-on sensors or another fab-specific customization. The SECS/GEM DCIM interface can generate Interface A data from the SECS/GEM interface while implementing a pass-through SECS/GEM interface to maintain unaffected fab Manufacturing Execution System (MES) connectivity. Alternatively, the SECS/GEM DCIM can use a second GEM port if the equipment has one. CIMPortal includes a growing set of packaged DCIM available to all customers. Customers can also develop custom DCIM to access proprietary data sources.