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Private Seminar |
This seminar is also offered as a private seminar. Click here for further information. |
Duration |
4 hours |
Level |
Introductory |
Overview |
This introductory seminar covers the new suite of Equipment Data Acquisition (EDA) standards known as “Interface A.” These include Common Equipment Model (E120), Equipment Client Authentication and Authorization (E132), Equipment Self Description (E125), and Data Collection Management (E134).
The seminar also features a brief demonstration of an implementation of the EDA standards to give attendees a feel for how the individual services can be used in typical manufacturing operational scenarios. |
Who Should Attend |
Equipment Suppliers will gain an understanding of the specific demands that will be placed on their equipment by Interface A in terms of message content, usage scenarios, and overall performance in an automated production context.
Semiconductor Manufacturers will learn how the capabilities of Interface A can provide detailed equipment and process data to the people and systems that need it.
- Software Engineers
- Systems Engineers
- Quality Assurance Engineers
- Support Engineers
- Customer Service Personnel
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Course Objectives |
- Provide an overview of the Interface A standards
- Find out about example fab/equipment system configurations that show how the standards support Equipment Engineering System (EES) application environment
- Overview of the background and motivation for the EDA standards
- Summary of the performance expectations at the tool and fab levels
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Documents Reviewed |
- SEMI E120 - Common Equipment Model (CEM)
- SEMI E125 - Equipment Self Description (ESD)
- SEMI E132 - Equipment Client A&A (ECAA)
- SEMI E134 - Data Collection Management
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Instructor(s) |
Alan Weber, Alan Weber & Associates
Paul McGuire, Alan Weber & Associates |
Prerequisites |
None. |
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