This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1978; previously published March 2001.

The purpose of this document is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of ammonium hydroxide for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of ammonium hydroxide used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C21-0708 (technical revision)
SEMI C21-0301 (technical revision)
SEMI C21-0600 (technical revision)
SEMI C21-0699 (first published)