This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published in 1978; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for methyl ethyl ketone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of methyl ethyl ketone for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of methyl ethyl ketone used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C32-0306 (complete rewrite)
SEMI C32-0699 (first published)