This specification was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1978; previously published in 1999.

NOTICE: This document was completely rewritten in its entirety November 2005.

The purpose of this document is to standardize requirements for sodium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of sodium hydroxide pellets for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of sodium hydroxide pellets used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C42-0699 (first published)