This specification was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1999.

NOTICE: This document was completely rewritten in its entirety November 2005.

The purpose of this document is to standardize requirements for 50% sodium hydroxide solution used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of 50% sodium hydroxide solution for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of 50% sodium hydroxide solution used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C43-1105 (technical revision)
SEMI C43-0699 (first published)