These specifications were technically approved by the Global Liquid Chemicals Committee and are the direct responsibility of the European Liquid Chemicals Committee. Current edition approved by the European Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be published July 2004. Originally published November 2001; previously published November 2002.

The purpose of this document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. The scope of this document is all grades of DMSO used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Specifications for Reagents

Revision History
C53-0704 (technical revision)
C53-0302 (technical revision)
C53-1101 (first published)