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SEMI C054 - Specifications and Guidelines for Oxygen

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Product Code: STD-SEMI-C054

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Description

The purpose of this document is to provide a series of specifications for different grades of Oxygen (O2) that are used in the semiconductor industry. This document covers requirements for all standard grades of oxygen used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases

Revision History
SEMI C54-1103 (first published)