This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on December 10, 2004. Initially available at www.semi.org January 2005; to be published March 2005.

The purpose of this document is to provide a series of specifications for different grades of Nitrous Oxide (N2O) that are used in the semiconductor industry. This document covers requirements for all grades of nitrous oxide used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline.

Referenced SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases

Revision History
SEMI C60-0305 (first published)