This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on April 30, 2001. Initially available at www.semi.org May 2001; to be published July 2001. Originally published in 1981; previously published in 1995.

Phosphine is a highly toxic, flammable, colorless gas with an odor of decaying fish. In high concentrations, it is pyrophoric. It is shipped as a liquid in cylinders under its own vapor pressure.

Referenced SEMI Standards
None.

Revision History
SEMI C3.6-0701 (technical revision)
SEMI C3.6-95 (technical revision)
SEMI C3.6-93 (technical revision)
SEMI C3.6-81 (first published)