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  SEMI C003.27 - Specification for Boron Trifluoride (BF[3]) in Cylinders, 99.0% Quality
 
 
SEMI International Standards

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Product Code: STD-SEMI-C003.27

Description
 

The purpose of this document is to provide a specification for Boron Trifluoride (BF3) used in the semiconductor industry. This document covers requirements for Boron Trifluoride (BF3) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline.

Referenced SEMI Standards
None.

Revision History
SEMI C3.27-1102 (technical revision)
SEMI C3.27-94 (technical revision)
SEMI C3.27-84 (first published)
 

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