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  SEMI C003.39 - Standard for Nitrogen Trifluoride (NF[3])
 
 
SEMI International Standards

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Product Code: STD-SEMI-C003.39

Description
 

Nitrogen trifluoride is a toxic, odorless, colorless, nonflammable gas. It is a strong oxidizer and supports combustion.

Referenced SEMI Standards
None.

Revision History
SEMI C3.39-0304 (technical revision)
SEMI C3.39-0999 (technical revision)
SEMI C3.39-91 (technical revision)
SEMI C3.39-89 (first published)
 

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