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  SEMI C003.52 - Standard for Tungsten Hexafluoride, 99.996% Quality
 
 
SEMI International Standards

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Product Code: STD-SEMI-C003.52

Description
 

To define the specification and analytical methods and validate the specifications for WF6. This specification relates to a geometry of 0.5 µ or less (0.35 or 0.5 range) and describes analytical techniques using gas phase analysis.

Referenced SEMI Standards
None.

Revision History
SEMI C3.52-0200 (technical revision)
SEMI C3.52-95 (first published)
 

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