This guideline was technically approved by the global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on December 15, 1999. Initially available at www.semi.org January 2000, to be published February 2000. Originally published in 1997.

E This standard was editorially modified in September 2006 to correct an error. Changes were made to § 2.

Referenced SEMI Standards
None.

Revision History
SEMI C3.54-0200E (editorial revision)
SEMI C3.54-0200 (technical revision)
SEMI C3.54-0298 (technical revision)
SEMI C3.54-0697 (first published)