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SEMI C003.57 - Specification for Carbon Dioxide, CO[₂], Electronic Grade in Cylinders

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Product Code: STD-SEMI-C003.57

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Description

Carbon dioxide is a non-flammable, colorless, odorless, slightly acidic gas which is stable under normal conditions.

Referenced SEMI Standards
None.

Revision History
SEMI C3.57-0600 (first published)

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