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  Home > SEMI >

  SEMI C003.58 - Specification for Octafluorocyclobutane, C[4]F[8], Electronic Grade in Cylinders
 
 
SEMI International Standards

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Description
 

NOTICE: This entire document was completely revised in 2003.

Octafluorocyclobutane, also known as perfluorocyclobutane, is a gas under normal atmospheric conditions (15C and 760 mm Hg). The gas is a non-flammable, non-toxic, colorless and odorless gas which is stable under normal conditions.

Referenced SEMI Standards
None.

Revision History
SEMI C3.58-0303 (technical revision)
SEMI C3.58-0600 (first published)
 

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