The purposes of this document are: (1) to set a maximum permissible particle concentration for 20/0.02 grade oxygen bulk supply gas, and (2) to describe a reference method for its verification. This document applies only to oxygen gas delivered through pipelines; it is not applicable to cylinder gas or oxygen gas in its liquid state.

This document applies only to oxygen gas delivered through pipelines; it is not applicable to cylinder gas or oxygen gas in its liquid state.

Referenced SEMI Standards
None.

Revision History
SEMI C6.2-93 (Reapproved 1102)
SEMI C6.2-93 (technical revision)
SEMI C6.2-89 (first published)