The purposes of this document are: (1) to set a maximum permissible particle concentration for 20/0.2 hydrogen gas and (2) to describe a reference method for its verification.

This document applies only to hydrogen gas delivered through pipelines; it is not applicable to cylinder gases or gases in their liquid state.

Referenced SEMI Standards
None.

Revision History
SEMI C6.3-89 (Reapproved 0303)
SEMI C6.3-89 (first published)