The purposes of this document are: (1) to set a maximum permissible particle concentration for 10/0.2 grade nitrogen and argon bulk supply gases, and (2) to describe a reference method for its verification.

This document applies only to nitrogen gas and argon gas delivered through pipelines; it is not applicable to cylinder gases or gases in their liquid state.

Referenced SEMI Standards
None.

Revision History
SEMI C6.5-90 (Reapproved 1102)
SEMI C6.5-90 (first published)