This guide was technically approved by the Global Liquid Chemicals Committee and is the direct responsibility of the North American Liquid Chemicals Committee. Current edition approved by the North American Regional Standards Committee on November 4, 2004. Initially available at www.semi.org January 2005; to be published March 2005. Originally published in 1998; previously published February 1999.

This document is intended to provide a minimal set of guidelines for the quantitative determination of a method detection limit (MDL) from data supporting a SEMI Process Chemicals or Gases specification. This guide applies to trace contaminants specified in SEMI Process Chemicals or Gases standards and guidelines. All relevant trace contaminants should have an MDL determined from a regression analysis of a calibration curve that is equal to, or less than, their specifications. This guide is intended for use in both establishing new specifications within SEMI as well as verification of performance to SEMI specifications.

Referenced SEMI Standards
SEMI C16 — Guide for Precision Reporting/Data Traceability

Revision History
SEMI C10-0305 (technical revision)SEMI C10-0299 (technical revision)
SEMI C10-94 (first published)