This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 16, 2006. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published 1978; previously published July 2005.

The purpose of this document is to standardize requirements for hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of hydrofluoric acid used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C28-0306 (technical revision)
SEMI C28-0705 (technical revision)
SEMI C28-0704 (technical revision)
SEMI C28-0301 (technical revision)
SEMI C28-0699 (first published)