This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published 1981; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of mixed acid etchants for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of mixed acid etchants used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C2 — Specifications for Etchants

Revision History
SEMI C34-0306 (complete rewrite)
SEMI C34-0699 (first published)