This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published 1981; previously published November 2006.

The purpose of this document is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of phosphoric acid used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C36-1107 (technical revision)
SEMI C36-1106 (technical revision)
SEMI C36-0705 (technical revision)
SEMI C36-0301 (technical revision)
SEMI C36-0200 (technical revision)
SEMI C36-0699 (first published)