This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published 1978; previously published 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for xylenes used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of xylenes used in the semiconductor industry. This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o-, m-, and p- isomers and ethyl benzene) 99.0% min and Ethyl benzene 18% max.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C51-0706 (complete rewrite)
SEMI C51-0699 (first published)