This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published November 2004.

The purpose of this document is to provide a specification for liquid carbon dioxide (CO2) that is used in near critical, critical and supercritical applications in the semiconductor industry.

This document provides purity requirements for all grades of liquid carbon dioxide that are used in near critical, critical and supercritical applications in the semiconductor industry.

If analytical methods are not complete, the requirements are presented as a guideline.

NOTE 1: Minimum purity requirements. Some applications may require higher purity.

Referenced SEMI Standards
SEMI C10 — Guide for Determination of Method Detection Limits
SEMI C15 — Test Method for ppm and ppb Humidity Standards
SEMI F33 — Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)

Revision History
SEMI C55-1104 (first published)