This standard covers the specification of nominal edge length and thickness and related tolerances of a flat panel display substrate. These dimensions apply to substrates that are principally used in fabricating AMLCD displays. These dimensions may also be applicable to substrates for other display types. The edge lengths specified range from 300 x 300 mm to 500 x 500 mm. A single thickness, 1.1 mm, applies to all substrates.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D12 — Specification for Edge Condition of Flat Panel Display (FPD) Substrates

Revision History
SEMI D5-94 (Reapproved 0703)
SEMI D5-1994 (technical revision)
SEMI D5-1993 (first published)