This standard was technically approved by the global Flat Panel Display – Mask Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008. Originally published in 1992; previously published March 2005.

This specification defines standard for substrates used to fabricate liquid crystal display masks.

This specification applies to photomasks that are principally used in fabricating liquid crystal displays. The edge lengths specified range from 202.8 × 202.8 mm to 1220 × 1400 mm.

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (see SEMI P1).

Referenced Standards:
SEMI P1 — Specification for Hard Surface Photomask Substrates

Revision History:
SEMI D6-0308 (technical revision)
SEMI D6-0305 (technical revision)
SEMI D6-1101 (technical revision)
SEMI D6-0699 (technical revision)
SEMI D6-1296 (technical revision)
SEMI D6-1993 (first published)