This document provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates, and of dimensional, thermal, chemical, optical and mechanical properties of FPD substrates. These terms and definitions are applicable to both front and back substrates used in FPD fabrication.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for FPD Substrates
SEMI D5 — Standard Size for FPD Substrates
SEMI D7 — FPD Glass Substrate Surface Roughness Measurement Method
SEMI D11 — Specification for FPD Glass Substrate Cassettes
SEMI D12 — Specification for Edge Conditions of FPD Substrates
SEMI D15 — FPD Glass Substrate Surface Waviness Measurement Method
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays

Revision History
SEMI D9-0303 (technical revision)
SEMI D9-1101 (technical revision)
SEMI D9-94 (first published)