This document defines various aspects of the edges of a flat panel display substrate and describes their relationships. It assumes the existence of terminology described in other SEMI flat panel display documents. It applies to substrates whose nominal thickness specification is 1.1 mm. The edges of a flat panel display substrate are important in both the specifications for and uses of the material. They effect the means for producing, handling, storing, and processing substrates. Defining the terminology and the geometric properties of these edges will assist both the producers and users of substrates and processing/inspection equipment.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates

Revision History
SEMI D12-95 (Reapproved 0703)
SEMI D12-95 (first published)