This document covers the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus, optical stylus, and optical interferometric measurement methods. This test method is applicable to the documentation of waviness of all types of glass substrates used for flat panel displays.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D9 — Definitions for Flat Panel Display Substrates

Revision History
SEMI D15-1296 (Reapproved 0703)
SEMI D15-1296 (first published)