This specification was technically approved by the Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Stadards Committee July 1998. Published on SEMI OnLine September 1998; print version published September 1998.

This specification defines feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost-effective interfacing while preserving freedom of choice in material handling equipment. These standards define mechanical features on or about the process tool port, and in front of or on the tool face. Although these features are intended for specific functions, they do not set design requirements for any particular functionality.

The interface requirements are meant to be universal and to avoid the promotion of any particular form of transport. Therefore, they are useful for the interfacing of continuous direct WIP transports, such as conveyors, or discrete vehicles of foreseeable future design, such as AGVs, to the process tool port. The dimensions incorporated in the standard apply to single panel handling as well as substrate carriers.

Referenced SEMI Standards
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes

Revision History
SEMI D16-0998 (first published)