This document was editorially modified in October 2000 to correct a formatting error. Changes were made to FIgure 5.

This standard specifies the cassettes used to horizontally transport and store glass substrates 0.7 mm-1.1 mm thick (max) in a flat panel display (FPD) manufacturing facility. This standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and inter-changeability at all mechanical interfaces. Most of the requirements given in this specification are in the form of algebraic expressions defining maximum or minimum dimensions referenced from the length and width of the intended substrate with very few required surfaces. Only the mechanical interfaces for cassettes are specified; no materials requirements or micro-contamination limits are given. However, this standard has been written so that cassettes of various designs and materials can be manufactured in conformance with it.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D6 — Standard Edge Length and Thickness for Flat Panel Display Mask Substrates
SEMI D9 —Definitions for Flat Panel Display Substrates
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes
SEMI D21 — Terminology for Flat Panel Display Masks
SEMI E15 — Specification for Tool Load Port

Revision History
SEMI D10-0299E (editorial revision)
SEMI D18-0299 (first published)