This standard was technically approved by the global Flat Panel Display - Mask Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published in 1993; previously published October 2000.

This document defines defect terminology for FPD masks. By this standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.

These terms apply to photomasks that are principally used in fabricating flat panel display.

Referenced SEMI Standards
None.

Revision History
SEMI D20-0706 (technical revision)
SEMI D20-1000 (technical revision)
SEMI D20-93E (editorial revision)
SEMI D20-1993 (first published)