This specification establishes a set of standards to assist in specifying and ordering large area masks for the Flat Panel Display industry. A major objective is to improve the cycle time, order process efficiency and reduce the overall cost of manufacturing for both the mask maker and the customer. This specification is intended for use in North America as an emerging market. However, the applicability of this specification is not restricted or limited to this region alone. This standard was developed to address a North American need for a common set of requirements for specifying, manufacturing, and ordering large area masks.

The following areas are covered by this document: Registration and Accuracy, Critical Dimensions, Centrality, Pellicles, Edge Length and Thickness, Symbology, Data Formats, Auto Inspection Artifacts, and Product Labeling. This specification is being issued so that the industry may evaluate the concept covered before its adoption as a full standard. It is expected that initial application will occur mostly in North America, however, nothing in this standard limits its use to this market region.

Referenced SEMI Standards
SEMI D6 — Specification for Edge Length and Thickness for Flat Panel Display Mask Substrates
SEMI P1 — Specification for Hard Surface Photomask Substrates
SEMI P5 — Specification for Pellicles
SEMI P6 — Specification for Registration Marks for Photomasks
SEMI T8 — Specification for Marking of Glass Flat Panel Display Substrates with a Two-Dimensional Matrix Code Symbol

Revision History
SEMI D26-1000 (first published)