NOTE: SEMI E15.1 is no longer published within the SEMI E15 family of standards. It is published and sold separately on its own page.

E This specification was editorially modified in November 2004 to correct an editorial error. Changes were made to Table 1.

This standard is intended to unify the interface between process/inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport. This specification deals with the mechanical interface (load port) for wafer carrier transfer between wafer carrier material transport systems, including humans, and wafer fabrication/inspection equipment (tools). The concept defines the placement and orientation of a wafer carrier on a tool to allow reasonable interfacing with mechanized material movement systems without compromising human access to perform the material exchange function.

Referenced SEMI Standards
SEMI E1 — Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers
SEMI E19 — Standard Mechanical Interface (SMIF)

Revision History
SEMI E15-0698E2 (Reapproved 0703)
SEMI E15-0698E (Reapproved 0703)
SEMI E15-0698E (editorial revision)
SEMI E15-0698 (technical revision)
SEMI E15-0090 (first published)