This standard was technically approved by the Global Physical Interfaces and Carriers Committee and is the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition approved by the North American Physical Interfaces and Carriers Committee on July 21, 2002. Initially available at www.semi.org October 2002; to be published November 2002. Orignally published in 1991; previously published June 1997.

The purpose of the standard is to specify the emergency off capability to the modules of a cluster tool; to allow module emergency off disconnect and reconnect in a safe manner without removing power from the rest of the tool; and to prevent power from being applied to a module when its emergency off is non-functional. The standard deals with the delivery and emergency interruption of electrical power to the modules of a cluster tool.

Referenced SEMI Standards
SEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard

Revision History
SEMI E20-0697 (Reapproved 1102)
SEMI E20-0697 (technical revision)
SEMI E20-0091 (first published)