Main Document:
SEMI E54-0708
Sensor/Actuator Network Standard

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 14, 2004. It was available at www.semi.org in May 2004 and on CD-ROM in July 2004. Originally published in 1997; previously published March 2003.

NOTICE: The designation of SEMI E54 was updated during the 0708 publishing cycle to reflect the revision of SEMI E54.1.

This specification provides the structure of SEMIs Sensor/Actuator Network (SAN) standard. It provides the definition for interoperability with respect to SEMI SAN standard-compliant Sensor/Actuator devices.

This standard specifies how devices interoperate on a network as part of the control system for equipment.

This specification, which is the root of the SAN standard, defines the relationships of each of the other specifications that are components of the SEMI SAN standard.

Subordinate Documents:
SEMI E54.1-0708
Standard for Sensor/Actuator Network Common Device Model

This standard defines a model comprised of device objects which are common to all devices on a semicon-ductor equipment sensor/actuator communications network.

This document describes common device structure and behavior (i.e., the minimum data structure and behavior all devices must support to operate on the network). These devices may range from simple sensors and actuators through hosts, masters, or controllers.

The model specified in this document is used in conjunction with a sensor/actuator network specific device model which describes the data structure and behavior characteristic of the specific device. Together, these two models are sufficient to completely describe a device as it appears from the network interface.

This standard, together with a sensor/actuator network interoperability guideline, a sensor/actuator network communication specification, and one or more specific device model specifications form a complete interoperability specification. The sensor/actuator network document architecture is shown in Figure 1.

To comply with this standard, a device must implement and support instances of the objects, object attributes, object services, and object behaviors identified in this document, unless explicitly stated otherwise.

SEMI E54.2-0698 (Reapproved 0704)
Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots

This guide recommends the method, form, and content for adding specific device models and associated Sensor Actuator Network Communications Standard (SANCS) extensions to the SEMI Sensor Actuator Network (SAN) standard. This guide facilitates consistency of these ballots, leading to better consistency and clarity of the resulting specifications and to easier development of SAN standard-conformant devices that achieve a high level of interoperability.

Referenced Standards:
SEMI E54
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

SEMI E54.1
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54.2
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Standard for Sensor/Actuator Network Specific Device Model for Mass Flow Device

Revision History:
SEMI E54-0708 (designation update)
SEMI E54-0308 (designation update)
SEMI E54-1107 (designation update)
SEMI E54-0307 (designation update)
SEMI E54-1106 (designation update)
SEMI E54-0306 (designation update)
SEMI E54-1105 (designation update)
SEMI E54-0705 (designation update)
SEMI E54-0305 (technical revision)
SEMI E54-0704 (technical revision)
SEMI E54-0303 (technical revision)
SEMI E54-0997 (first published)

SEMI E54.1-0708 (technical revision)
SEMI E54.1-1000 (Reapproved 1106)
SEMI E54.1-1000 (first published)

SEMI E54.2-0698 (Reapproved 0704)
SEMI E54.2-0698 (first published)