NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published July 2005.

This document defines a communication specification based on the A-LINK protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.

This document gives interoperability with SEMI E54 common/specific device model based Sensor/Actuator devices.

This document specifies how sensor/actuator/controller devices interoperate on the network specific for the A-LINK Public specification referenced in the § 4, as a part of equipment’s control system.

This document defines relation with main part of SEMI E54 including Common Device Model (CDM) and existing Specific Device Models (SDMs). This document is to be used with the CDM and one or more SDMs, as well as the A-LINK Public Specification.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices

Revision History:
SEMI E54.17-0706 (technical revision)
SEMI E54.17-0705 (first published)