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  SEMI G006 - Test Method for Seal Ring Flatness
 
 
SEMI International Standards

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Product Code: STD-SEMI-G006

Description
 

This specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than .330".

Referenced SEMI Standards
None.

Revision History
SEMI G6-89 (technical revision)
SEMI G6-83 (first published)

 

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