This guideline details recommendations for a standardized thermal test chip design for referee test purposes. A sample data format for the test chip can be found in Appendix A. Based on the results of computer simulations of various chip-substrate configurations, the following recommendations are made for the design of thermal test chips for VLSI package characterization.

Referenced SEMI Standards
None.

Revision History
SEMI G32-94 (technical revision)
SEMI G32-86 (first published)