| This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published 1990; previously published November 2005. Silicon technology underlies the integrated circuit and device industry. Silicon wafers are the basis for most integrated circuits and devices used in electronic equipment. It is very useful to have common forms that include the parameters that should be included in the specifications for various kinds of silicon wafer products. This guide indicates how to develop such a form for inclusion in the appropriate specification and how the various forms can work together in preparing order entry information for the various silicon wafer products. This document does not provide the order entry form. It guides the development of specifications. The order entry form is described in various silicon material specifications as listed in § 5. This guide covers the methodology for developing specification forms for order entry includinghow to identify form sections, form columns, and form headings, instructions for line format and how to number items, how to add new items appropriate to a given wafer product to the form, how to reference new items from another section of the form not within the specification, and method to request new additions from a group responsible for a section of the form for order entry that contains essential parameters for the particular wafer but is not included in the order form for that wafers specifications. This guide lists the sections of the order entry form and shows where they appear and how they are used. This guide provides information on how to construct the ordering information section for silicon wafer specifications. Referenced SEMI Standards
SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers
SEMI M6 Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
SEMI M8 Specification for Polished Monocrystalline Silicon Test Wafers
SEMI M16 Specification for Polycrystalline Silicon
SEMI M24 Specification for Polished Monocrystalline Silicon Premium Wafers
SEMI M34 Guide for Specifying SIMOX Wafers
SEMI M38 Specification for Polished Reclaimed Silicon Wafers
SEMI M41 Specification of Silicon-on-Insulator (SOI) for Power Device/ICs
SEMI M47 Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications
SEMI M57 Guide for Specifying Silicon Annealed Wafers
SEMI M59 Terminology for Silicon Technology
SEMI M61 Specification for Silicon Epitaxial Wafers with Buried Layers
SEMI M62 Specifications for Silicon Epitaxial Wafers Revision History
SEMI M18-1107 (technical revision)
SEMI M18-1105E2 (editorial revision)
SEMI M18-1105E (editorial revision)
SEMI M18-1105 (technical revision)
SEMI M18-0704 (technical revision)
SEMI M18-0304 (technical revision)
SEMI M18-0702 (technical revision)
SEMI M18-0302 (technical revision)
SEMI M18-0701 (technical revision)
SEMI M18-95 (technical revision)
SEMI M18-94 (technical revision)
SEMI M18-93 (technical revision)
SEMI M18-92 (technical revision)
SEMI M18-90 (first published) |
