This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published November 2004. Originally published in 1991.

This procedure is a flame atomic absorption analytical method for sodium and potassium analysis in photoresist. The applicable concentration range is 0.1 to 1 ppm when the sample is diluted one to four. The precision was found to be within 0.1 ppm in a round robin analysis between four laboratories.

Referenced SEMI Standards
None.

Revision History
SEMI P13-91 (Reapproved 1104)
SEMI P13-91 (first published)