This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published November 2004. Originally published in 1992.

This procedure is a flame atomic absorption analytical method for sodium andpotassium analysis in photoresist MIF developers. The applicable concentration range is 20 to 1000 ppb.

Referenced SEMI Standards
None.

Revision History
SEMI P15-92 (Reapproved 1104)
SEMI P15-92 (first published)