This safety guideline was technically approved by the Global Environmental, Health, and Safety Committee and is the direct responsibility of the North American Environmental, Health, and Safety Committee. Current edition approved by the North American Regional Standards Committee on December 4, 2003. Initially available at www.semi.org February 2004; to be published March 2004. Originally published in 1992.

NOTICE: This safety guideline was completely rewritten in 2003.

This safety guideline provides a method for determining cylinders of which types of chemicals should be in separate gas cabinets and which cylinders may be in gas cabinets with each other. The safety guideline is intended to be used by those working or doing research in semiconductor-related technology. This safety guideline refers to chemicals, which includes gases and liquids, contained in cylinders, that are used in gaseous form because of their vapor pressure or because they may be transported as a vapor by a carrier gas. It also pertains to all types of cylinders, up to and including an internal volume of 1000 liters. The primary intent of this guideline is directed to a cylinder gas in use in, or being dispensed in, the research and manufacturing processes. This safety guideline addresses purge gases supplied in cylinders and used to purge process chemical lines. This safety guideline addresses process chemicals in cylinders which are designed to provide them at pressures less than 101.3 kPa (one atmosphere).

Referenced SEMI Standards
None.

Revision History
SEMI S4-0304 (complete rewrite)
SEMI S4-92 (first published)