This standard was technically approved by the global Environmental, Health, & Safety Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published June 2000.

NOTICE: This document was completely rewritten in 2007.

This document provides design guides to minimize environmental impacts in consideration of end of life of semiconductor manufacturing equipment (SME) or its components.

This guide addresses design considerations to minimize environmental impact of SME or component disposal at end of life.

This guide addresses design considerations to encourage reuse or recycling of SME or its components.

Referenced SEMI Standards
SEMI S2 —Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S12 —Guidelines for Equipment Decontamination
SEMI S13 —Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

Revision History
SEMI S16-0307 (technical revision)
SEMI S16-0600 (first published)