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SEMI International Standards
The SEMI International Standards Program is one of the key services offered by Semiconductor Equipment and Materials International (SEMI) for the benefit of the worldwide semiconductor and flat panel display (FPD) industries. Standards afford a way to meet the challenges of increasing productivity while enabling business opportunities around the globe. The program, started over 26 years ago in North America, has expanded to include programs in Taiwan, Europe and Japan.

SEMI C001 - Guide for the Analysis of Liquid Chemicals
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SEMI C002 - Specifications for Etchants
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SEMI C003 - Specifications for Gases
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SEMI C003.02 - Specification for Arsine (AsH[3]) in Cylinders, 99.94% Quality
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SEMI C003.06 - Standard for Phosphine (PH[3]) in Cylinders, 99.98% Quality
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SEMI C003.12 - Specification for Ammonia (NH[3]) in Cylinders, 99.998% Quality
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SEMI C003.20 - Standard for Helium (He) in Cylinders, 99.9995% Quality
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SEMI C003.24 - Specification for Sulfur Hexafluoride (SF[6]) in Cylinders, 99.97% Quality
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SEMI C003.26 - Specification for Tungsten Hexafluoride (WF[6]) in Cylinders, 99.8% Quality
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SEMI C003.27 - Specification for Boron Trifluoride (BF[3]) in Cylinders, 99.0% Quality
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SEMI C003.32 - Specification for Chlorine (Cl[2]), 99.996% Quality
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SEMI C003.33 - Standard for Boron Trichloride (BCl[3]) (Provisional)
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SEMI C003.34 - Specification for Disilane (Si[2]H[6]) in Cylinders, 97% Quality
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SEMI C003.35 - Specification for Hydrogen Chloride (HCl), 99.997% Quality
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SEMI C003.37 - Standard for Hexafluoroethane (C[2]F[6]), 99.97% Quality
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SEMI C003.39 - Standard for Nitrogen Trifluoride (NF[3])
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SEMI C003.40 - Standard for Carbon Tetrafluoride (CF[4]), VLSI Grade
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SEMI C003.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality
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SEMI C003.51 - Specification for Boron Trichloride (BCl[3]), 99.98% Quality
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SEMI C003.52 - Standard for Tungsten Hexafluoride, 99.996% Quality
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SEMI C003.54 - Gas Purity Guideline for Silane (SiH[4])
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SEMI C003.55 - Standard for Silane (SiH[4]), Bulk
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SEMI C003.56 - Specification for Diborane Mixtures
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SEMI C003.57 - Specification for Carbon Dioxide, CO[2], Electronic Grade in Cylinders
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SEMI C003.58 - Specification for Octafluorocyclobutane, C[4]F[8], Electronic Grade in Cylinders
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SEMI C006.02 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
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SEMI C006.03 - Particle Specification for Grade 20/0.2 Hydrogen (H[2]) Delivered as Pipeline Gas
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SEMI C006.04 - Particle Specification for Grade 20/0.02 Nitrogen (N[2]) and Argon (Ar) Delivered as Pipeline Gas
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SEMI C006.05 - Particle Specification for Grade 10/0.2 Nitrogen (N[2]) and Argon (Ar) Delivered as Pipeline Gas
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SEMI C006.06 - Particle Specification for Grade 10/0.1 Nitrogen (N[2]) and Argon (Ar) Delivered as Pipeline Gas
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SEMI C006.07 - Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
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SEMI C009.01 - Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
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SEMI C010 - Guide for Determination of Method Detection Limits
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SEMI C014 - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
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SEMI C015 - Test Method for ppm and ppb Humidity Standards
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SEMI C016 - Guide for Precision and Data Reporting Practices
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SEMI C018 - Specification for Acetic Acid
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SEMI C019 - Specification for Acetone
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SEMI C020 - Specification and Guidelines for Ammonium Fluoride 40%
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SEMI C021 - Specifications and Guideline for Ammonium Hydroxide
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SEMI C022 - Guideline for Boron Tribromide
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SEMI C023 - Specifications for Buffered Oxide Etchants
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SEMI C024 - Specification for n-Butyl Acetate
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SEMI C025 - Specification for Dichloromethane (Methylene Chloride)
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SEMI C026 - Specification and Guideline for Hexamethyldisilazane (HMDS)
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SEMI C027 - Specifications and Guidelines for Hydrochloric Acid
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SEMI C028 - Specifications for Hydrofluoric Acid
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SEMI C029 - Specifications and Guideline for 4.9% Hydrofluoric Acid (10:1 v/v)
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SEMI C030 - Specifications and Guidelines for Hydrogen Peroxide
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SEMI C031 - Specification for Methanol
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SEMI C032 - Specification for Methyl Ethyl Ketone
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SEMI C033 - Specifications for n-Methyl 2-Pyrrolidone
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SEMI C034 - Specification and Guideline for Mixed Acid Etchants
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SEMI C035 - Specifications and Guideline for Nitric Acid
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SEMI C036 - Specifications for Phosphoric Acid
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SEMI C037 - Specification for Phosphoric Etchants
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SEMI C038 - Guideline for Phosphorus Oxychloride
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SEMI C039 - Specification for Potassium Hydroxide Pellets
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SEMI C040 - Specification for Potassium Hydroxide, 45% Solution
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SEMI C041 - Specifications and Guidelines for 2-Propanol
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SEMI C042 - Specification for Sodium Hydroxide Pellets
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SEMI C043 - Specification for Sodium Hydroxide, 50% Solution
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SEMI C044 - Specifications and Guidelines for Sulfuric Acid
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SEMI C045 - Specification and Guideline for Tetraethylorthosilicate (TEOS)
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SEMI C046 - Guideline for 25% Tetramethylammonium Hydroxide
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SEMI C047 - Guideline for Trans 1,2 Dichloroethylene
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SEMI C048 - Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade
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SEMI C049 - Guideline for Trimethylborate
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SEMI C050 - Specifications and Guideline for Trimethylphosphite
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SEMI C051 - Specifications and Guidelines for Xylenes
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SEMI C052 - Specification for the Shelf Life of a Specialty Gas
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SEMI C053 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]
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SEMI C054 - Specifications and Guidelines for Oxygen
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SEMI C055 - Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality
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SEMI C056 - Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
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SEMI C057 - Specifications and Guidelines for Argon
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SEMI C058 - Specifications and Guidelines for Hydrogen
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SEMI C059 - Specifications and Guidelines for Nitrogen
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SEMI C060 - Specifications and Guidelines for Nitrous Oxide (N2O)
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SEMI C061 - Specification for Bar-Code Container Identification
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SEMI C062 - Guideline for Porogen Precursors Used in Low K CVD Processes
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SEMI C063 - Guideline for Organosilicate Precursors Used in Low K CVD Processes
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SEMI C064 - SEMI Statistical Guidelines for Ship To Control
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SEMI C065 - Guideline for Trimethylsilane (3MS), 99.995% Quality
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SEMI C066 - Guidelines for Trimethylaluminium (TMAI), 99.5% Quality
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SEMI D003 - Quality Area Specification for Flat Panel Display Substrates
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SEMI D005 - Standard Size for Flat Panel Display Substrates
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SEMI D006 - Specification for Liquid Crystal Display (LCD) Mask Substrates
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SEMI D007 - FPD Glass Substrate Surface Roughness Measurement Method
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SEMI D009 - Terminology for FPD Substrates
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SEMI D010 - Test Method for Chemical Durability of Flat Panel Display Glass Substrates
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SEMI D011 - Specification for Flat Panel Display Glass Substrate Cassettes
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SEMI D012 - Specification for Edge Condition of Flat Panel Display (FPD) Substrates
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SEMI D013 - Terminology for FPD Color Filters
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SEMI D015 - FPD Glass Substrate Surface Waviness Measurement Method
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SEMI D016 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port
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SEMI D017 - Mechanical Specification for Cassettes Used to Ship Flat Panel Display Glass Substrates
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SEMI D018 - Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates
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SEMI D019 - Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filters
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SEMI D020 - Terminology for FPD Mask Defect
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