This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published in 1980; previously published June 1999.

Revision History — This is the first major revision since the original release of SECS-I in 1980. Very little of the original intent of SECS-I has been altered, although there are a few significant additions. The changes are summarized in Appendix 1. This specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.

Intent — This standard provides a means for independent manufacturers to produce equipment and/or hosts which can be connected without requiring specific knowledge of each other.

The SECS-I standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly and packaging. A host is a computer or network of computers which exchange information with the equipment to accomplish manufacturing. This standard includes the description of the physical connector, signal levels, data rate and logical protocols required to exchange messages between the host and equipment over a serial point-to-point data path. This standard does not define the data contained within a message. The meaning of messages must be determined through some message content standard such as SEMI E5, Equipment Communications Standard (SECS-II).

Layered Protocol — The SECS-I protocol can be thought of as a layered protocol used for point-to-point communication. The levels within SECS-I are the physical link, block transfer protocol, and message protocol (see Related Information ¶ R1-1.1).

Speed — It is not the intent of this standard to meet the communication needs of all possible applications. For example, the speed of RS-232 may be insufficient to meet the needs of transferring mass amounts of data or programs in a short period of time, such as might be required by high speed functional test applications.

Network Support — The method by which blocks of data are routed to a piece of equipment or find their way back to the proper host application is not specified by SECS-I. In a network, the roles of host and equipment might be assumed by any party in the network. In this situation, one end of the communications link must assume the role of the equipment and the other the role of the host.

Overview of SECS-I — The SECS-I standard defines point-to-point communication of data utilizing a subset of the international standard known in the U.S.A. as EIA RS-232-C and in Japan as JIS C 6361 for the connector and voltage levels. The actual transmission consists of 8-bit bytes sent serially with one start and one stop bit. The communication is bidirectional and asynchronous, but flows in one direction at a time. The direction is established by special characters and a handshake, after which the data itself is sent. Data is sent in blocks of 254 bytes or less. Each block consists of a 10-byte header followed by data. A message is a complete unit of communication in one direction and consists of 1–32,767 blocks. Each block header contains information for identifying the block as part of a specific message. Messages are paired by a request and its reply which together are called a transaction.

Structure of Document — This document is divided into sections which correspond to major aspects of the standard. The sections outline requirements as well as implications of the requirements. The standard may be implemented in a variety of ways, depending upon the computer environment where it is placed. Implementation is not part of the standard. Information which may be useful for implementation is included in the form of Related Information.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 — Message Content (SECS-II)
SEMI E6 — SEMI Facilities Interface Specification Format

Revision History
SEMI E4-0699 (Reapproved 0307)
SEMI E4-0699 (technical revision)
SEMI E4-0298 (technical revision)
SEMI E4-0080 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1982; previously published March 2008.

The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.

It is the intent of this standard to be fully compatible with SEMI E4 — Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the message transfer protocol requirements are contained in § 6.

It is the intent of this standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.

The messages defined in the standard support the most typical activities required for IC manufacturing. The standard also provides for the definition of equip­ment-specific messages to support those activities not covered by the standard messages. While certain activ­ities can be handled by common software in the host, it is expected that equipment-specific host software may be required to support the full capabilities of the equipment.

SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I.

SECS-II defines the method of conveying information between equipment and host in the form of messages. These messages are organized into categories of activities, called streams, which contain specific messages, called functions. A request for information and the corresponding data transmission is an example of such an activity.

SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for a self-describing data format to guarantee proper interpretation of the message.

The interchange of messages is governed by a set of rules for handling messages called the transaction protocol. The transaction protocol places some mini­mum requirements on any SECS-II implementation.

Referenced Standards:
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E148 — Specification for Time Sychronization and Definition of the TS-Clock Object

Revision History:
SEMI E5-0708 (technical revision)
SEMI E5-0308 (technical revision)
SEMI E5-1107 (technical revision)
SEMI E5-0707 (technical revision)
SEMI E5-1106E (editorial revision)
SEMI E5-1106 (technical revision)
SEMI E5-0706 (technical revision)
SEMI E5-1104E (editorial revision)
SEMI E5-1104 (technical revision)
SEMI E5-0704 (technical revision)
SEMI E5-0304 (technical revision)
SEMI E5-1103 (technical revision)
SEMI E5-0703 (technical revision)
SEMI E5-0303 (technical revision)
SEMI E5-1102 (technical revision)
SEMI E5-0702 (technical revision)
SEMI E5-0302 (technical revision)
SEMI E5-1101 (technical revision)
SEMI E5-0701 (technical revision)
SEMI E5-0301 (technical revision)
SEMI E5-1000 (technical revision)
SEMI E5-0600 (technical revision)
SEMI E5-0200 (technical revision)
SEMI E5-0999 (technical revision)
SEMI E5-0699 (technical revision)
SEMI E5-0299 (technical revision)
SEMI E5-0996 (technical revision)
SEMI E5-0082 (first published)

NOTICE: SEMI E30.1 and SEMI E30.5 are no longer published within the SEMI E30 family of standards. They are each published and sold separately on their own pages. SEMI E30.4 was re-designated as SEMI E82 and is also published and sold separately on its own page.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published in 1992; previously published November 2003.

E This standard was editorially modified in September 2007 to correct an error. Changes were made to Table 11.

The scope of the GEM standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link. The SEMI E5 (SECS-II) standard provides the definition of messages and related data items exchanged between host and equipment. The GEM standard defines which SECS-II messages should be used, in what situations, and what the resulting activity should be. Figure 1.1 illustrates the relationship of GEM, SECS-II and other communications alternatives.

The GEM standard does NOT attempt to define the behavior of the host computer in the communications link. The host computer may initiate any GEM message scenario at any time and the equipment shall respond as described in the GEM standard. When a GEM message scenario is initiated by either the host or equipment, the equipment shall behave in the manner described in the GEM standard when the host uses the appropriate GEM messages.

The capabilities described in this standard are specifically designed to be independent of lower-level communications protocols and connection schemes (e.g., SECS-I, SMS, point-to-point, connection-oriented or connectionless). Use of those types of standards is not required or precluded by this standard.

Referenced SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 - Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 - Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E139 — Specification for Recipe and Parameter Management (RaP)

Revision History
SEMI E30-0307E (editorial revision)
SEMI E30-0307 (technical revision)
SEMI E30-1103E2 (editorial revision)
SEMI E30-1103E (editorial revision)
SEMI E30-1103 (technical revision)
SEMI E30-0703 (technical revision)
SEMI E30-0303 (technical revision)
SEMI E30-1000 (technical revision)
SEMI E30-0600 (technical revision)
SEMI E30-0200 (technical revision)
SEMI E30-0999 (technical revision)
SEMI E30-0699 (technical revision)
SEMI E30-0092 (first published)

NOTICE: SEMI E30.1 is no longer published within the SEMI E30 family of standards. It is published and sold separately on its own page.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published June 1998; previously published February 2000.

This standard establishes a Specific Equipment Model (SEM) for Inspection and Review Equipment (ISEM). The model consists of equipment characteristics and behavior that are to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The intent of this standard is to facilitate the integration of ISEM equipment into an automated (semiconductor fabrication) factory. This document accomplishes this by defining an operational model for ISEM equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional activity that are within the scope of this standard: substrate pattern maps; defect classification code management; and review data management.

The scope of this standard is limited to the definition of Inspection, Review, and Inspection/ Review equipment behavior as perceived by a SEMI Equipment Communications Standard II (SEMI E5/SECS-II) host that complies with SEMI E30. It defines the external view of the equipment through the SECS link; it does not define the internal operation of the equipment. This standard expands the SEMI E30 requirements and capabilities in the areas of the processing state model, remote commands, variable items, alarms, and data collection.

This standard is intended for ISEM equipment that generates data and information about anomalies and defects found on substrates. Inspection equipment finds anomalies. Anomalies are occurrences on a substrate that have been judged to be unexpected, abnormal, incongruous, or inconsistent. Anomalies may be examined using review equipment, at which time they may be classified as defects or non-defects. Some inspection equipment may generate, and some review equipment may use, coordinate data to locate anomalies on a substrate. The accuracy of the coordinate data generated or used is equipment-dependent.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services Single-Session Mode (HSMS-SS)
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI M20 — Specification for Establishing a Wafer Coordinate System
SEMI M21 — Specification for Assigning Addresses to Rectangular Elements in a Cartesian Array

Revision History
SEMI E30.1-1106 (technical revision)
SEMI E30.1-0200 (technical revision)
SEMI E30.1-0098 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008. Originally published 2001; previously published 2002.

NOTE: SEMI E30.5 is no longer published within the SEMI E30 family of standards. It is published and sold separately on its own page.

This document establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities.

The scope of this document is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model. It defines the view of the equipment through the SECS II link. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for all equipment behavior of this class.

This document assumes that the SEMI E30 fundamental requirements and all additional capabilities except those noted in SEMI E30 Capabilities Section in this document have been implemented on the MSEM equipment. This document expands the SEMI E30 Standard requirements and capabilities in the areas of the processing state model, collection events, Process Program management, remote commands, data item variables, and coordinate systems.

Referenced Standards:
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI M20 — Practice for Establishing a Wafer Coordinate System
SEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array

Revision History:
SEMI E30.5-0308 (Reapproved 0308)
SEMI E30.5-0302 (technical revision)
SEMI E30.5-1101 (first published)

Main Document:
SEMI E32-0997
Material Movement Management (MMM)

Automated material movement represents a significant milestone in the evolution of automation in semiconductor manufacturing. The standardization of the transfer process is critical to the economic viability of material movement automation. This standard addresses the communications needs of the semiconductor manufacturing facility with respect to material movement.

This standard addresses automated material movement on the semiconductor factory floor - the task of transporting objects (material, et al) from one processing or storage location to another. It defines the concepts of material movement, the behavior of the equipment (including transfer devices) in relation to material movement, and the messaging services which are needed to accomplish the task. The scope of this standard is defined from two viewpoints. The first is the breadth of the functionality covered. The second is the depth to which it is covered. The breadth of functionality covered by this standard is limited to the activity required to transfer an object from a location on entity "A" to a location on entity "B" under the supervision of a factory host. This transfer may occur directly between two factory process equipment, or may involve the assistance of a "transfer agent", a device dedicated to material transfer. This document assumes that the transfer system controller is either a part of the host or a part of a potentially complex transfer agent. There are some forms of material movement that do not fall within the domain of this standard and thus are not applicable to the methods described herein. The subject of alarm reporting is not covered in this document. While material movement-related alarm situations will exist, the definition of the mechanism for reporting such alarms is left to other standards documents.

This standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol. A messaging service includes the identification that a message shall be exchanged and definition of the data contained within that message. It does not include information on the structure of the message, how the data is represented within the message, or how the message is exchanged. This additional information is contained with the message protocol. The defined services may be applied to multiple protocols. Information on the mapping of material movement services to specific protocols (e.g., SECS-II) are added as adjunct standards.

Subordinate Documents:
SEMI E32.1-0997
SECS-II Support for Material Movement

This document contains the necessary information to implement the Material Movement Mangement standard (SEMI E32) using the SEMI E5 SECS-II communications protocol. Automated material movement represents a significant milestone in the evolution of automation in semiconductor manufacturing. The standardization of the transfer process is critical to the economic viability of material movement automation. SEMI E32 addresses the communications needs of the semiconductor manufacturing facility with respect to material movement. SEMI E32 addresses automated material movement on the semiconductor factory floor (the task of transporting objects (material, et al.) from one processing or storage location to another. It defines the concepts of material movement, the behavior of the equipment (including transfer devices) in relation to material movement, and the messaging services which are needed to accomplish the task. The scope of this standard is defined from two viewpoints. The first is the breadth of the functionality covered. The second is the depth to which it is covered.

Referenced SEMI Standards
SEMI E32
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

Revision History
SEMI E32-0997 (technical revision)
SEMI E32-0094 (first published)

SEMI E32.1-0997 (technical revision)
SEMI E32.1-0094 (first published)

Main Standard:
SEMI E36-0704
Semiconductor Equipment Manufacturing Information Tagging Specification

This specification was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available at www.semi.org February 1999; to be published June 1999. Originally published 1995; previous published revision February 1998.

NOTICE: The designation of this standard was updated during the 0704 publishing cycle to reflect the creation of SEMI E36.1.

The purpose of Semiconductor Equipment Manufacturing Information Tagging is to define a markup philosophy, a markup framework, and an information markup which is rich enough to facilitate: electronic interchange and distribution of information; quality hardcopy printing and screen display of information; consistent high-precision online searching; and reuse and repurposing of information for such applications as integrating source material into training material and online support applications. The intent of this document is to create an information interchange specification, not an authoring specification or an electronic presentation specification. Semiconductor Equipment Manufacturing Information Tagging will define the markup necessary for exchanging documents electronically, for facilitating retrieval of information content, and for validating information interchanges.

Subordinate Document:
SEMI E36.1-0704
Specification for the Semiconductor Equipment Manufacturing Information Tagging Standard E36

This specification was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available at www.semi.org February 1999; to be published June 1999. Originally published 1995; previous published revision February 1998.

The purpose of this specification provides the consolidated Tag Library required in implementing the SEMI E36-0699 standard. The specification contains two levels of compliance necessary in implementing the electronic documentation standard. The following two components make up the compliance levels. Level One Identity - Allows for content to be uniquely identified, most notably the Item ID and Edition ID attributes. Level Two Type and Metadata - Association of semantic detail with items. Important information about the item that allows us to interpret the item correctly. Compliance is established for this level by ensuring that the item uses a standard tag name and is equipped with a small standard set of metadata properties as defined by the specification.

Referenced SEMI Standards
None.

Revision History
SEMI E36-0704 (designation update)
SEMI E36-0699 (technical revision)
SEMI E36-0095 (first published)

SEMI E36.1-0704 (first published)

Main Document:
SEMI E37-0308 (Reapproved 0708)
High-Speed SECS Message Services (HSMS) Generic Services

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published in 1995.

NOTICE: The designation of SEMI E37 was updated during the 0308 publishing cycle to reflect the reapproval of SEMI E37.1.

HSMS provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another.

HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other attributes of HSMS are not required.

HSMS is also intended as an alternative to SEMI E13 (SECS Message Services) for applications where TCP/IP is preferred over OSI.

It is intended that HSMS be supplemented by subsidiary standards which further specify details of its use or impose restrictions on its use in particular application domains.

High-Speed SECS Message Services (HSMS) defines a communication interface suitable for the exchange of messages between computers in a semiconductor factory.

Subordinate Documents:
SEMI E37.1-0702 (Reapproved 0308)
High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

HSMS-SS provides a means for independent manufacturers to produce implementations which can be connected without requiring specific knowledge of one another.

HSMS-SS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed. HSMS-SS is intended as an alternative to SEMI E13 (SECS Message Services) for applications where TCP/IP is preferred over OSI as a communications basis.

High-Speed SECS Message Services Single-Session Mode (HSMS-SS) is a subsidiary standard to High-Speed SECS Message Services (HSMS) Generic Services.

SEMI E37.2-95 (Reapproved 0303)
High-Speed SECS Message Services General Session (HSMS-GS)

HSMS-GS is intended to support the needs of complex systems containing multiple independently accessible subsystems such as cluster tools or track systems. Specifically, procedures are defined to permit access to any individual subsystem or set of subsystems within any complex system.

High-Speed SECS Message Services General Session (HSMS-GS) is a subsidiary standard to High-Speed SECS Message Services (HSMS) Generic Services.

Referenced Standards:
SEMI E37
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E37.1
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E37.2
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

Revision History:
SEMI E37-0308 (Reapproved 0708)
SEMI E37-0308 (designation update)
SEMI E37-0303 (designation update)
SEMI E37-0702 (technical revision)
SEMI E37-0298 (technical revision)
SEMI E37-0095 (first published)

SEMI E37.1-0702 (Reapproved 0308)
SEMI E37.1-0702 (technical revision)
SEMI E37.1-0096E (editorial revision)
SEMI E37.1-0095 (first published)

SEMI E37.2-0095 (Reapproved 0303)
SEMI E37.2-0095 (first published)

Main Document:
SEMI E38-1296
Cluster Tool Module Communications (CTMC)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published in 1995; previously published December 1996.

NOTICE: This document was balloted and approved for withdrawl in 2007.

Cluster tools fulfill a need for modularity and flexibility in semiconductor manufacturing equipment. This standard addresses the communications with and among modules within a cluster tool for automated control. The module communications services defined here will enable standard interoperability of modules from independent suppliers. Together with other cluster tool standards, this is intended to result in the emergence of standards-compliant interoperable sub-systems. They should allow applications software to be developed which can assume the existence of these services and allow software products to be developed to offer them. The adoption of the standards described will greatly reduce the effort required to integrate cluster tool components from independent suppliers. Compliance requires support of a minimal but specific set of standard services. Cluster tool module communications address only communications with and among modules within a cluster tool and not the communications between the cluster tool and the factory. It is the modules and their interrelations which are modeled and not the cluster tool seen as a single equipment. The scope includes primary control services for material processing in process modules, material movement within the cluster tool, and material input/output with the factory. Support services also exist to enable recipe handling, resolution of exception conditions, event reporting, and data access. A reliable communications environment is required for distributed control and is specified in supplementary standards. This standard specifies the application of more general service standards as required within a cluster tool. This includes the limitations imposed by the cluster tool architecture and the fundamental functionality needed for compliance. The details of the general services, protocols, and communication environment elements are defined in the corresponding standards documents referenced.

Subordinate Document:
SEMI E38.1-95
Communications Environment HSMS/SECS-II for Cluster Tool Module Communications

NOTICE: This document was balloted and approved for withdrawl in 2007.

The purpose of this standard is to specify the communication environment for communication with and among modules in a cluster tool. The scope of this standard is communication within a cluster tool as defined in the standard Cluster Tool Module Communication Standard (CTMC, SEMI E38). This standard specifies the transmission of SECS-II messages by HSMS (SEMI E37), HSMS-GS (SEMI E37.2), and Ethernet. Other methods of message communication are possible but beyond the scope of this standard. This standard is intended to be one of possibly several supplements to the CTMC SEMI E38.

Referenced SEMI Standards
SEMI E38
SEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard
SEMI E22 — Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E32 — Material Movement Management Standard
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E38.1
SEMI E5 — SEMI Equipment Communication Standard 2 - Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.2 — High-Speed SECS Message Services General Session (HSMS-GS)

Revision History
SEMI E38-1296 (Withdrawn 0307)
SEMI E38-1296 (technical revision)
SEMI E38-95 (first published)

SEMI E38.1-95 (Withdrawn 0307)
SEMI E38.1-95 (first published)

Main Document:
SEMI E39-0703
Object Services Standard: Concepts, Behavior, and Services

This standard was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Information & Control Committee on March 12, 2003. Initially available at www.semi.org May 2003; to be published July 2003. Originally published in 1995; previously published November 2002.

The purpose of the Object Services Standard (OSS) is to provide general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes. In addition, it provides basic services for reading object attributes, setting their values, and for asking for an object's contents. This standard is intended to be referenced by other standards which define specific objects to reduce redundancy.

The scope of this standard is to provide concepts, behavior, and services common to a variety of public objects. Object models are common to multiple standards. Object services provide basic object-related definitions, and basic services for getting object attributes and setting attribute values, that can be used by all standards defining public objects. These services allow basic management of data based on objects. The object services defined in this document may be included in the services provided by other standards. They may also be provided independently of such other standards.

Subordinate Document:
SEMI E39.1-0703
SECS-II Protocol for Object Services Standard (OSS)

This document maps the services and data of the parent document (SEMI E39) to SECS-II streams and functions and data definitions. This document applies to all implementations of Object Services that use the SECS-II message protocol (SEMI E5).

The purpose of SEMI E39 is to provide general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes. In addition, SEMI E39 provides basic services for reading object attributes, setting their values, and for asking for an object's contents. SEMI E39 is intended to be referenced by other standards which define specific objects to reduce redundancy.

The scope of SEMI E39 is to provide concepts, behavior, and services common to a variety of public objects. Object models are common to multiple standards. Object services provide basic object-related definitions, and basic services for getting object attributes and setting attribute values, that can be used by all standards defining public objects. These services allow basic management of data based on objects. The object services defined in this document may be included in the services provided by other standards. They may also be provided independently of such other standards.

Referenced SEMI Standards
SEMI E39.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

Revision History
SEMI E39-0703 (technical revision)
SEMI E39-1102 (technical revision)
SEMI E39-1101 (technical revision)
SEMI E39-0600 (technical revision)
SEMI E39-0095 (first published)

SEMI E39.1-0703 (technical revision)
SEMI E39.1-1102 (technical revision)
SEMI E39.1-1101 (technical revision)
SEMI E39.1-1296 (technical revision)
SEMI E39.1-0095 (first published)

Main Document:
SEMI E40-1107
Standard for Processing Management

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published in 1995; previously published March 2007.

Automated management and command of material processing in equipment is a crucial aspect enabling factory automation. This standard addresses the communications needs within the semiconductor manufacturing environment with respect to the processing of material in equipment.

This standard specifies the application of the appropriate processing to specified material received at the processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to processing, and the messaging services which are needed to accomplish the task.

The communications services defined here enable standards-based inter-operability of independent systems. They allow application software to be developed that can assume the existence of these services and allow software products to be developed which offer them.

Implementation of automated processing management will help eliminate misprocessing of material. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard services.

The scope of this standard is automated material processing based on discrete processing jobs. It provides the functionality required for process management for modules within a cluster tool. It may be applied to sub-systems of other multi-resource equipment, as well as to host control of many types of equipment.

This standard supports individual management of jobs for identical processing of material within a group and concurrent processing of independent groups. Where material contains other material (such as carriers containing wafers), processing may be specified in terms of either material type.

A simple tuning mechanism is provided for limited feedforward and feedback control between process steps. A method is defined for taking advantage of recipe variable parameters. This is not expected to satisfy all closed loop control requirements. Other mechanisms are anticipated with greater flexibility for late tuning and handling complex data.

This standard does not provide services for receiving material for processing, or disposing of it after processing is complete. Automation of material transfer is assumed to be provided through other services, such as those defined in applicable SEMI standards.

This standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol.

A messaging service includes the identification that a message shall be exchanged and a definition of the data which is contained in that message. It does not include information on the structure of the message, how the data is represented within the message, or how the message is exchanged. This additional information is contained within the message protocol.

The defined services may be applied to multiple protocols. Information on the mapping of processing management services to special protocols (e.g., SECS-II) are added as adjunct standards.

The services assume a communications environment in which a reliable connection has been established between the user of the services and the provider of the services. Establishing, maintaining, releasing a connection, and handling communication failures are beyond the scope of this standard.

Subordinate Document:
SEMI E40.1-1106
SECS-II Support for Processing Management Standard

This document maps the services and data of SEMI E40 to SECS-II streams and functions and data definitions.

This is the standard way to implement the Processing Management, which provides remote control of wafer processing, using the SECS-II message protocol.

Referenced SEMI Standards
SEMI E40
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E53 — Event Reporting

SEMI E40.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E40 — Standard for Processing Management

Revision History
SEMI E40-1107 (technical revision)
SEMI E40-0307 (technical revision)
SEMI E40-1106 (technical revision)
SEMI E40-0705E (editorial revision)
SEMI E40-0705 (technical revision)
SEMI E40-0304 (technical revision)
SEMI E40-0703 (technical revision)
SEMI E40-1102 (technical revision)
SEMI E40-0702 (technical revision)
SEMI E40-1101 (technical revision)
SEMI E40-0701 (technical revision)
SEMI E40-0301 (technical revision)
SEMI E40-1000 (technical revision)
SEMI E40-0200 (technical revision)
SEMI E40-0999 (technical revision)
SEMI E40-0095 (first published)

SEMI E40.1-1106 (technical revision)
SEMI E40.1-0705 (technical revision)
SEMI E40.1-0304 (technical revision)
SEMI E40.1-1101 (technical revision)
SEMI E40.1-0701 (technical revision)
SEMI E40.1-1000 (technical revision)
SEMI E40.1-0095 (first published)

Main Document:
SEMI E41-95
Exception Management (EM) Standard

Interactive exception handling enhances the error recovery ability while maintaining automated control in the factory. This standard addresses the communications needs within the semiconductor manufacturing environment with respect to equipment exception handling. This standard specifies capabilities to be provided by the exception agent for effective reporting and interaction with respect to abnormal situations in the equipment. It describes the concept of exception management, the behavior of the equipment in relation to interactive exception handling, and the messaging services which are needed to provide the functionality. The communications services defined here will enable standards-based interoperability of independent systems. They shall allow application software to be developed which can assume the existence of these services and allow software products to be developed which offer them. Implementation of automated exception management will help reduce error recovery time and avoid changing from automatic to manual equipment control in many situations. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components. Compliance requires a specific set of standard services. The current scope of this standard is interactive exception handling within a cluster tool.

Subordinate Document:
SEMI E41.1-0996
SECS-II Support for the Exception Management Standard

This document maps the services and data of its prime document, SEMI E41, to SECS-II streams and functions and data definitions. This is the standard way to implement the Exception Management Standard, which provides remote control communication of exceptions and recovery, using the SECS-II message format.

Referenced SEMI Standards
SEMI E41.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

Revision History
SEMI E41-0095 (technical revision)
SEMI E41-0095 (first published)

SEMI E41.1-0996 (technical revision)
SEMI E41.1-0996 (first published)

This standard was technically approved by the Global Information & Control Committee and is the direct responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be published July 2004. Originally published September 1995; previously published February 2000.

E This standard was editorially modified in September 1999 to conform to its non-provisional status. Changes were made to § 1.2.

This standard defines the concepts required for management of recipes, the operations or behavior provided by the Recipe Management Standard (RMS), and the messages through which services are provided through an interface between the provider and the user of these services. The purpose of this standard is twofold: to enable applications software to be developed that can assume the existence of standard concepts, behaviors, and message services that collectively form Recipe Management and that take advantage of them and to enable software to be developed to offer the Recipe Management capabilities. This is a standard that defines concepts, behavior, and services to support the integration of automated recipe management within a semiconductor factory. These services are applicable to a variety of relationships, including both traditional host/equipment and cluster tool controller/attached module communications and control. The standard provides a set of communications services which allow such systems to transfer and manage recipes to ensure the correct processing of material within semiconductor manufacturing equipment and systems. RMS also requires compliance to SEMI E39 (Object Services Standard (OSS): Concepts, Behavior, and Services) for completeness.

Subordinate Document:
SEMI E42.1-0704
Standard for SECS-II Protocol for Recipe Management Standard (RMS)

This document maps the services and data of the parent document, SEMI E42, to SECS-II streams and functions and data definitions. This document applies to all implementations of Recipe Management that use the SECS-II message protocol [SEMI E5].

Referenced SEMI Standards
SEMI E42
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services

SEMI E42.1
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E53 — Event Reporting

Revision History
SEMI E41-0095 (technical revision)
SEMI E41-0095 (first published)

SEMI E41.1-0996 (technical revision)
SEMI E41.1-0996 (first published)

Main Document:
SEMI E53-1296
Event Reporting

Access to process data in equipment is crucial for effective process monitoring and control in a semiconductor manufacturing facility. This standard addresses the communication needs of semiconductor equipment and other factory objects, such as cell controllers or recipe servers, with respect to the timely collection and reporting of such data. The purpose of this standard is to provide a general purpose set of event reporting services that may be offered by equipment suppliers. This document may be referenced, in whole or in part, by other standards addressing higher level application domains. The communications services defined here will enable standards-based inter-operability of independent systems. They shall allow application software to be developed which can assume the existence of these services and allow software products to be developed which offer them. This standard is applicable to any stand-alone equipment, cluster module, cluster tool, or cell of automation in a factory. As such it addresses event reporting at all levels in the factory and equipment control hierarchy. This standard requires significant communication and computational resources and is, therefore, not applicable at or below the level of I/O distribution (e.g., sensor bus) within the equipment. This standard covers the reporting of data periodically and/or in response to events. Reports may also be requested on demand. This standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol. A messaging service includes the identification that a message shall be exchanged and definition of the data which is contained in that message. It does not include information on the structure of the message, how the data is represented within the message, or how the message is exchanged. This additional information is contained with the message protocol. The defined services may be applied to multiple protocols. Information on the mapping of these services to special protocols (e.g., SECS II) are added as adjunct standards. The services assume a communications environment in which a reliable connection has been established between the user and the provider of the services. Establishing, maintaining, and releasing a connection is beyond the scope of this standard.

Subordinate Document:
SEMI E53.1-1296
SECS-II Support for Event Reporting Standard

This document maps the services and data of its prime document, SEMI E53, to SECS-II streams and functions and data definitions. This is the standard way to implement the Event Reporting, which provides event-based reporting using the SECS-II message format.

Referenced SEMI Standards
SEMI E53
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E53 — Event Reporting

SEMI E53.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E38 — Cluster Tool Module Communications (CTMC)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management

Revision History
SEMI E53-0704 (technical revision)
SEMI E53-1296 (first published)

SEMI E53.1-0704 (technical revision)
SEMI E53.1-1296 (first published)

Main Document:
SEMI E54-0708
Sensor/Actuator Network Standard

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 14, 2004. It was available at www.semi.org in May 2004 and on CD-ROM in July 2004. Originally published in 1997; previously published March 2003.

NOTICE: The designation of SEMI E54 was updated during the 0708 publishing cycle to reflect the revision of SEMI E54.1.

This specification provides the structure of SEMIs Sensor/Actuator Network (SAN) standard. It provides the definition for interoperability with respect to SEMI SAN standard-compliant Sensor/Actuator devices.

This standard specifies how devices interoperate on a network as part of the control system for equipment.

This specification, which is the root of the SAN standard, defines the relationships of each of the other specifications that are components of the SEMI SAN standard.

Subordinate Documents:
SEMI E54.1-0708
Standard for Sensor/Actuator Network Common Device Model

This standard defines a model comprised of device objects which are common to all devices on a semicon-ductor equipment sensor/actuator communications network.

This document describes common device structure and behavior (i.e., the minimum data structure and behavior all devices must support to operate on the network). These devices may range from simple sensors and actuators through hosts, masters, or controllers.

The model specified in this document is used in conjunction with a sensor/actuator network specific device model which describes the data structure and behavior characteristic of the specific device. Together, these two models are sufficient to completely describe a device as it appears from the network interface.

This standard, together with a sensor/actuator network interoperability guideline, a sensor/actuator network communication specification, and one or more specific device model specifications form a complete interoperability specification. The sensor/actuator network document architecture is shown in Figure 1.

To comply with this standard, a device must implement and support instances of the objects, object attributes, object services, and object behaviors identified in this document, unless explicitly stated otherwise.

SEMI E54.2-0698 (Reapproved 0704)
Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots

This guide recommends the method, form, and content for adding specific device models and associated Sensor Actuator Network Communications Standard (SANCS) extensions to the SEMI Sensor Actuator Network (SAN) standard. This guide facilitates consistency of these ballots, leading to better consistency and clarity of the resulting specifications and to easier development of SAN standard-conformant devices that achieve a high level of interoperability.

Referenced Standards:
SEMI E54
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

SEMI E54.1
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54.2
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Standard for Sensor/Actuator Network Specific Device Model for Mass Flow Device

Revision History:
SEMI E54-0708 (designation update)
SEMI E54-0308 (designation update)
SEMI E54-1107 (designation update)
SEMI E54-0307 (designation update)
SEMI E54-1106 (designation update)
SEMI E54-0306 (designation update)
SEMI E54-1105 (designation update)
SEMI E54-0705 (designation update)
SEMI E54-0305 (technical revision)
SEMI E54-0704 (technical revision)
SEMI E54-0303 (technical revision)
SEMI E54-0997 (first published)

SEMI E54.1-0708 (technical revision)
SEMI E54.1-1000 (Reapproved 1106)
SEMI E54.1-1000 (first published)

SEMI E54.2-0698 (Reapproved 0704)
SEMI E54.2-0698 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 14, 2004. It was available at www.semi.org in May 2004 and on CD-ROM in July 2004. Originally published June 1998.

This specification is part of a suite of standards which specify the implementation of SEMI standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model comprised of device objects which are common to all Mass Flow Devices on a semiconductor equipment Sensor/Actuator communications network.

This specification specifically addresses the minimum attributes, services, and behavior a Mass Flow Controller (MFC) and Mass Flow Meter (MFM) device must support to be interoperable on the Sensor/Actuator Network.

This specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator Network, while still allowing flexibility for product differentiation and technology evolution.

The model specified in this specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the MFC or MFM as it appears from the network interface.

This specification, together with the Sensor/Actuator Network Standard, the Sensor/Actuator Network Common Device Model, and a Sensor/Actuator Network Communication Specification, form a complete interoperability specification for the MFC and MFM.

To comply with this specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these documents. Support for optional attributes, services, and behavior are not required to be compliant to this specification. Optional attributes, services, and behavior are specified in these documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device, they must be implemented as identified in this document.

Referenced Standards:
SEMI E12 — Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI E18 — Guideline for Temperature Specifications of the Mass Flow Controller
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E52 — Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

Revision History:
SEMI E54.3-0698 (Reapproved 0704)
SEMI E54.3-0698 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 22, 2004. It was available at www.semi.org in June 2004 and on CD-ROM in July 2004. Originally published September 1997.

This standard defines a communication specification based on the DeviceNet protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI- specified device models (common and device specific) in a semiconductor manufacturing tool.

Background and Motivation — DeviceNet provides for networking between simple industrial devices (e.g., sensors and actuators) and higher level devices such as controllers. DeviceNet provides:
- A solution to low-level device networking.
- Access to intelligence present in low-level devices.
- Master/Slave and Peer-to-Peer capabilities.

DeviceNet is based on the Controller Area Network (CAN) technology. CAN defines a Media Access Control (MAC) methodology and physical signaling characteristics. DeviceNet wraps a communication model and protocol as well as a complete Physical Layer definition around CAN to provide a complete network definition.

This document enables communications between intelligent devices on a SEMI-compliant SAN by providing a presentation mapping of common and specific device network visible structure and behavior to a DeviceNet network.

This document specifies the protocol and services that compliant intelligent devices must support to interchange information over this semiconductor equipment sensor/actuator network.

This document specifies the utilization of the DeviceNet protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDM's), on a DeviceNet network.

This document is used in conjunction with a SEMI standard SAN Common Device Model specification and one or more SEMI standard-specific device model specifications (e.g., for a mass flow controller). Together, they describe the externally visible data structure and behavior of devices using the DeviceNet networking capability in a SEMI-compliant SAN system.

This standard, together with a sensor/actuator network interoperability guideline, the sensor/actuator network common device model, one or more sensor/actuator network specific device model documents, and the DeviceNet specifications, form a complete interoperability standard. The general sensor/actuator network document architecture is shown in the Sensor/Actuator Network Common Device Model document in Figure 1.

Referenced Standards:
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

Revision History:
SEMI E54.4-0704 (technical revision)
SEMI E54.4-0997 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 7, 2004. It was available at www.semi.org in February 2005 and on CD-ROM in March 2005. Originally published September 1999.

This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific communications protocol based on the PROFIBUS-DP standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network standard suite and the PROFIBUS standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.

PROFIBUS is a vendor independent, open fieldbus standard for a wide range of applications in manufacturing, process and building automation. Vendor independence and openness are guaranteed by the IEC standards for PROFIBUS, IEC 61158 part 2 to part 6 and IEC 61784-1. PROFIBUS-DP is one version of PROFIBUS which is optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at the device level.

This document specifies a SAN communications standard based on the PROFIBUS-DP specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI standard Specific Device Model (SDM) specifications (e.g., for a Mass Flow Controller, In-Situ Particle Monitor Devices or Endpoint Devices), this Network Communication Standard (NCS) with the related PROFIBUS-DP standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor manufacturing equipment.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices

Revision History:
SEMI E54.8-0305 (technical revision)
SEMI E54.8-0999 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published February 2000; previously published July 2006.

This standard defines a communication specification based on the Modbus/TCP protocol over a Transmission Control Protocol/Internet Protocol (TCP/IP) network to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool.

Background and Motivation - Modbus/TCP over TCP/IP is a component level network which provides a simple, inexpensive, and fast means of exchanging data among control level industrial devices (e.g., sensors and actuators) and higher level devices such as controllers. Modbus/TCP over TCP/IP provides:
- A solution to low-level device networking,
- Access to intelligence present in low-level devices,
- Networking between higher level controllers, and
- Master/Slave and Peer-to-Peer communication capabilities.

Modbus/TCP specifies a communication model and protocol. The Physical, Data Link, and Network Layer definitions are defined by the network in which the Modbus/TCP protocol is embedded such as TCP/IP Ethernet.

This document enables communications between intelligent devices on a SEMI compliant SAN by providing a presentation mapping of common and specific device network visible structure and behavior to Modbus/TCP over a TCP/IP network.

This document specifies the protocol and services that compliant intelligent devices must support to exchange information over this semiconductor equipment sensor/actuator network.

This document specifies the utilization of the Modbus/TCP protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDMs), for the Modbus/TCP protocol over a TCP/IP network.

This document is used in conjunction with a SEMI standard SAN Common Device Model specification, one or more SEMI standard Specific Device Model (SDM) specifications (e.g., for a mass flow device), the Modicon Modbus Protocol Reference Guide and the Open Modbus/TCP Specification. Together, they describe the Modbus/TCP protocol, the externally visible data structures and behaviors of devices utilizing the Modbus/TCP networking capability in a SEMI compliant SAN system.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for In-Situ Particle Monitor Device
SEMI E54.11 — Specification Device Model for Endpoint Device
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

Revision History:
SEMI E54.9-0708 (technical revision)
SEMI E54.9-0706 (technical revision)
SEMI E54.9-0303 (technical revision)
SEMI E54.9-1000 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published May 2000.

This specification is part of a suite of standards that specify the implementation of SEMI standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network independent application model comprised of device objects that are common to all In-Situ Particle Monitor Devices on a semiconductor equipment Sensor/Actuator communications network.

An In-Situ Particle Monitor (ISPM) is a device that measures and counts particles. These devices classify by size and count, particles in the environment (gaseous, liquid, or vacuum) utilizing a technique such as detecting light from a sample region of the environment’s space. These counts are accumulated in bins and then reported. The number of bins varies by vendor and model.

This specification specifically addresses the minimum attributes, services, and behavior an In-Situ Particle Monitor (ISPM) device must support to be interoperable on the Sensor/Actuator Network.

This specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator Network, while still allowing flexibility for product differentiation and technology evolution.

The model specified in this specification is used in conjunction with SEMI E54.1 (Standard for Sensor/Actuator Network Common Device Model (CDM)) to completely describe the ISPM as it appears from the network interface.

This specification, together with SEMI E54, SEMI E54.1, and one of the Sensor/Actuator Network Communication Specifications, form a complete interoperability specification for the ISPM.

To comply with this specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these documents. Support for optional attributes, services, and behavior is not required to be compliant to this specification. Optional attributes, services, and behavior are specified in these documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device they must be implemented as identified in this document.

This specification does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this specification to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

Revision History:
SEMI E54.10-0600 (Reapproved 1106)
SEMI E54.10-0600 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published in 2001; previously published November 2005.

This specification is part of a suite of standards that specify the implementation of SEMI standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network independent application model comprised of device objects that are common to all Endpoint Devices on a semiconductor equipment Sensor/Actuator communication network.

An Endpoint Device (EPD) is a device that measures and monitors process characteristics to determine when a specific threshold or event has been obtained usually to signal the completion of a process or process step. These endpoint devices are, but not limited to, devices that may classify a process endpoint by determining the size and count of particles in the process environment, detecting and determining optical light from a sample region of the environment’s space, or determining motor current of an equipment component.

This specification specifically addresses the minimum attributes, services and behavior an Endpoint Device (EPD) must support to be interoperable on the Sensor/Actuator Network.

This specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator Network, while still allowing flexibility for product differentiation and technology evolution.

The model specified in this specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the Endpoint Device (EPD) as it appears from the network interface.

This specification, together with the Sensor/Actuator Network Standard, the Sensor/Actuator Network Common Device Model, and a Sensor/Actuator Network Communication Specification, form a complete interoperability specification for the EPD.

To comply with this specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these documents. Support for optional attributes, services and behavior is not required to be compliant to this specification. Optional attributes, services, and behavior are specified in these documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device they must be implemented as identified in this document.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

Revision History:
SEMI E54.11-1106 (technical revision)
SEMI E54.11-1105 (technical revision)
SEMI E54.11-0301 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published May 2001; previously published July 2001.

E This standard was editorially modified in September 2001 to correct a typographical error and the omission of a required disclaimer. § 2.3 was added and changes were made to § 7.6.2.6.

This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific communications protocol based on the CC-Link standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network standard suite and the CC-Link standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.

CC-Link is a vendor independent, open device level network standard. Vendor independence and openness are guaranteed by the CC-Link Partner Association.

This document specifies a SAN communications standard based on the CC-Link specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI standard Specific Device Model (SDM) specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related CC-Link standard describe the data structures, interactions and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators and controllers in semiconductor manufacturing equipment.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior and Services
SEMI E54.1 — Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device

Revision History:
SEMI E54.12-0701E (Reapproved 1106)
SEMI E54.12-0701E (editorial revision)
SEMI E54.12-0701 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 22, 2002. It was available at www.semi.org in January 2003 and on CD-ROM in March 2003.

This standard defines a communication specification based on the EtherNet/IP EtherNet/IP is a trademark of Open DeviceNet Vendor Association (ODVA) (Ethernet/Industrial Protocol) network to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool.

EtherNet/IP is a communication system suitable for use in industrial environments. EtherNet/IP allows intelligent devices to exchange time-critical application information. These devices include simple I/O devices such as sensors/actuators, as well as complex control devices such as robots, programmable logic controllers, and process controllers.

EtherNet/IP uses CIP (Control and Information Protocol), the common network, transport and application layers also shared by DeviceNet [SEMI E54.4]. EtherNet/IP provides:
- A cost effective solution to bridge factory Ethernet [IEEE 802.3] networks to SEMI E54.4 DeviceNet low-level device networks,
- Access to intelligence present in low-level devices, and
- Producer/Consumer model for Master/Slave and Peer-to-Peer application relationships.

EtherNet/IP makes use of standard Ethernet and TCP/IP technology to transport CIP communications packets. The result is a common, open application layer on top of open and highly popular Ethernet and TCP/IP protocols.

EtherNet/IP provides a producer/consumer model for the exchange of time-critical control data. The producer/consumer model allows the exchange of application information between a sending device (e.g., the producer) and many receiving devices (e.g., the consumers) without the need to send the data multiple times to multiple destinations. For EtherNet/IP, this is accomplished by making use of the CIP network and transport layers along with IP Multicast technology. Many EtherNet/IP devices can receive the same produced piece of application information from a single producing device.

EtherNet/IP makes use of standard IEEE 802.3 technology; there are no non-standard additions that attempt to improve determinism. Rather, EtherNet/IP recommends the use of commercial switch technology, with 100 Mbps bandwidth and full-duplex operation, to provide for more deterministic performance.

Referenced Standards:
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.2 — Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots

Revision History:
SEMI E54.13-0303 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 10, 2004. It was available at www.semi.org in February 2005 and on CD-ROM in March 2005.

This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific communications protocol based on the PROFINET standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network standard suite and the PROFINET standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.

PROFINET is a vendor independent, open field bus standard for a wide range of applications in manufacturing, process and building automation.

The application model of PROFINET is compatible with the model of PROFIBUS. The same mapping rules apply. PROFINET is optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at the device level.

This document specifies a SAN communications standard based on the PROFINET specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI standard Specific Device Model (SDM) specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related PROFINET standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor manufacturing equipment.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices

Revision History:
SEMI E54.14-0305 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published February 2005; previously published July 2006.

This standard defines a communication specification based on the SafetyBUS p protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing equipment.

Background and Motivation - SafetyBUS p is a device level network which provides a simple, inexpensive, fast, and deterministic means of exchanging data among industrial devices (e.g., sensors and actuators) and higher level devices such as controllers (e.g., programmable control systems) while at the same time providing for the communication of information at a high priority level to support reliable operations. SafetyBUS p provides:
- A solution to low-level device networking,
- Access to intelligence present in low-level devices,
- Networking between higher level controllers,
- Master/Slave and Peer-to-Peer communication capabilities, and
- Serial communication of device-critical information.

SafetyBUS p specifies a communication model and protocol. The Physical and Data Link Layer definitions are defined by the Controller Area Network (CAN) technology. The CAN specification provides the Media Access Control (MAC) methodology and physical signaling characteristics.

This document enables communications between intelligent devices on a SEMI compliant SAN by providing a presentation mapping of common and specific device network visible structure and behavior to SafetyBUS p network.

This Network Communication Standard specification for SafetyBUS p is not intended to be a safety guideline for using SafetyBUS p technology. This document specifies a SAN communications standard specification based on the Object Communication Specification (OCS) for the SafetyBUS p Protocol. This SAN is structured in compliance with SEMI E54.1.

This document specifies the protocol and services that compliant intelligent devices shall support to exchange information over the SafetyBUS p semiconductor equipment sensor/actuator network.

This document specifies the utilization of the SafetyBUS p protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDMs), on a SafetyBUS p network.

This document is used in conjunction with a SEMI standard SAN Common Device Model specification, one or more SEMI standard Specific Device Model (SDM) specifications (e.g., for a mass flow device), the SafetyBUS p Object Communications Specification Reference Guide. Together, they describe the SafetyBUS p protocol, the externally visible data structures and behaviors of devices utilizing the SafetyBUS p networking capability in a SEMI compliant SAN system.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for an Endpoint Device
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

Revision History:
SEMI E54.15-1107 (technical revision)
SEMI E54.15-0706 (technical revision)
SEMI E54.15-0305 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published July 2005.

NOTICE: This document replaced SEMI E54.6 in 2005.

This standard specification defines a communication specification based on the ANSI/EIA/CEA-709.1 Control Networking Protocol (LonWorks) to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on semiconductor manufacturing equipment.

This document specifies a mapping of the SEMI Common Device Model (CDM) onto LonWorks technology using the LonMark Interoperability Guidelines established for LonWorks devices. The LonMark International Association will review and approve the enhanced SEMI LonMark functional profiles presented in this network communication document and incorporate the required SEMI profiles into the LonMark Interoperability Guidelines.

Background and Motivation — The LonWorks communications system provides interconnection of smart control devices such as sensors, actuators, and controllers in a fast-response time, low-cost network for industrial use. LonWorks enables multiple devices to share a single network, thereby significantly reducing the point-to-point wiring between controllers, sensors, and actuators. The LonWorks network communications standard (NCS) is based on the seven-layer ANSI/EIA/CEA-709.1 (LonWorks) protocol, implemented by the Neuron Chip, a physical layer transceiver, and an optional host processor. The ANSI/EIA/CEA-709.1 (LonWorks) control networking protocol was developed by Echelon and may be freely licensed for implementation on any hardware platform. The SEMI NCS for LonWorks is based on the LonMark interoperability guidelines, which provide a framework for interoperable use of the ANSI/EIA/CEA-709.1 (LonWorks) protocol at layers 1–6, as well as at the application layer. Where the LonMark interoperability guidelines do not provide the functionality required by the SEMI Common Device Model (CDM) and the SEMI Specific Device models (SDM), the guidelines are extended with SEMI-specific enhanced profile requirements.

This document specifies a SAN communications specification standard, based on the ANSI/EIA/CEA-709.1 Control Networking Protocol (LonWorks) specification, that enables communication with SAN devices configured according to the SEMI SAN Common Device Model and appropriate SEMI SAN Specific Device Model (SDM) specifications.

This document specifies the use of LonWorks technology for services that compliant intelligent devices must support in order to exchange information over this semiconductor equipment sensor/actuator network.

This document specifies the utilization of LonWorks technology to present externally visible device structure and behavior, specified in the CDM and appropriate SDMs, on a LonWorks network.

This document is used in conjunction with the SEMI SAN Common Device Model specification and one or more SEMI SAN Specific Device Model specifications (e.g., for a mass flow controller). Together, the model documents describe the externally visible data structures and behavior of devices using LonWorks technology in a SEMI-compliant SAN system.

This specification, together with the sensor/actuator network common device model, one or more sensor/actuator network specific device model documents, the ANSI/EIA/CEA-709.1 (LonWorks) protocol specification, and the LonMark interoperability guidelines, specifies requirements for SEMI SAN implementations based on LonWorks technology.

Referenced Standards:
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for An In-Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Specific Device Model for an Endpoint Device
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

Revision History:
SEMI E54.16-1106 (technical revision)
SEMI E54.16-0705 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published July 2005.

This document defines a communication specification based on the A-LINK protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.

This document gives interoperability with SEMI E54 common/specific device model based Sensor/Actuator devices.

This document specifies how sensor/actuator/controller devices interoperate on the network specific for the A-LINK Public specification referenced in the § 4, as a part of equipment’s control system.

This document defines relation with main part of SEMI E54 including Common Device Model (CDM) and existing Specific Device Models (SDMs). This document is to be used with the CDM and one or more SDMs, as well as the A-LINK Public Specification.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices

Revision History:
SEMI E54.17-0706 (technical revision)
SEMI E54.17-0705 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published March 2006.

This specification is part of a suite of standards which specify the implementation of SEMI standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model comprised of device objects which are common to all Vacuum Pump Devices on a semiconductor equipment Sensor/Actuator communications network.

This specification for a vacuum pump device specifically addresses the minimum attributes, services, and behavior a Vacuum Pump Device (VPD) device must support to be interoperable on the Sensor/Actuator communication network. This specification describes the VPD as a class of devices that include mechanical roughing pumps, turbo molecular pumps, cryogenic pumps and roughing pumps each with a booster. The attributes, services and behaviors described for the VPD are either required or optional for each pump type. Additional manufacturer specific attributes, services and behaviors unique to each pump type are not detailed in this specification.

This specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator communication network, while still allowing flexibility for product differentiation and technology evolution.

The Vacuum Pump Device model specified in this specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the vacuum pump as it appears from the network interface.

This specification, together with the Sensor/Actuator Network Standard, the Sensor/Actuator Network Common Device Model, and a Sensor/Actuator Network Communication Specification, form a complete interoperability specification for the Vacuum Pump Device (VPD).

To comply with this specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in this document. Support for optional attributes, services, and behavior are not required to be compliant to this specification. Optional attributes, services, and behavior are specified in these documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device, they must be implemented as identified in this document.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E52 — Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers

Revision History:
SEMI E54.18-1106 (technical revision)
SEMI E54.18-0306 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008. Originally published March 2007.

This document defines a communication specification based on the MECHATROLINK protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.

This document gives interoperability with SEMI E54 common/specific device model based Sensor/Actuator devices.

This document specifies how Sensor/Actuator/Controller devices interoperate on the network specific for the MECHATROLINK Public specification referenced in § 4, as a part of equipment’s control system.

This document defines relation with main part of SEMI E54 including Common Device Model (CDM) and existing Specific Device Models (SDMs). This document is to be used with the CDM and one or more SDMs, as well as the MECHATROLINK Public Specification.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specific Device Model for Vacuum Pump Devices

Revision History:
SEMI E54.19-0308 (technical revision)
SEMI E54.19-0307 (first published)

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007.

This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific communications protocol based on the EtherCAT standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network standard suite and the EtherCAT standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.

EtherCAT is a vendor independent, open field bus standard for a wide range of applications in manufacturing, process and building automation, supported by the EtherCAT Technology Group.

The application model of EtherCAT is compatible with the model of CANopen. CANopen — CAN based communication standard defined in CENELEC Standard EN50325-4, CENELEC - European Committee for Electrotechnical Standardization. The same mapping rules apply.

EtherCAT is optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at the device level.

This document specifies a SAN communications standard based on the EtherCAT specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI standard Specific Device Model (SDM) specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related EtherCAT standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor manufacturing equipment.

Referenced Standards:
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

Revision History:
SEMI E54.20-1107 (first published)

Main Document:
SEMI E58-0703
Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of SEMI E58.1.

This document provides standards for implementing and collecting SEMI E10 state changes at the equipment level per SEMI E10. SEMI E10 defines various terms and equipment states but was not written specifically for application by automated equipment. This document is intended to provide a consistent interpretation of these equipment states through formal state model methodology. ARAMS defines concepts, behavior, and message services to support the integration of automated systems within a semiconductor factory. To implement the integration of SEMI E10 states on automated equipment, integration of definitions and requirements must be detailed and precise to ensure interpretations are consistent across equipment suppliers. This provides an opportunity to automatically retain information at the equipment itself. Both equipment supplier and equipment user benefit from the automation of SEMI E10 data collection at the equipment through application of a consistent state model. SEMI E10 defines specific states but does not address transitions between states. The ARAMS standard specifies the triggers for state transitions made by automated equipment. Extensions to SEMI E10 described in this document apply to decisions made by automated equipment only. This standard is applicable to the following relationships: traditional host/equipment, operator/equipment, and cluster tool controller/attached module. The scope of this document is to define standards which facilitate equipment-level capture and communication of SEMI E10 related data. Specifically, this document provides the following: An equipment state model that defines the rules for equipment state changes, a set of standard equipment codes for representing substates of the six basic equipment states defined in SEMI E10, definition of equipment-generated data, concepts and messages required to exchange information, requirements for fundamental compliance to ARAMS, and additional optional specifications. This standard is intended as a supplement to SEMI E10 to be used for equipment support of SEMI E10. Formal definitions of all terms common to both documents are provided solely by SEMI E10.

Subordinate Documents:
SEMI E58.1-0697 (Reapproved 0703)
SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

This document maps the services and data of the Automated Reliability, Availability, and Maintainability Standard (ARAMS) to SECS-II streams and functions and data definitions. This document applies to all implementations of ARAMS that use the SECS-II message protocol (SEMI E5).

Referenced SEMI Standards
SEMI E58
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E38 — Cluster Tool Module Communications (CTMC)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting

Revision History
SEMI E58-0703 (technical revision)
SEMI E58-0301 (technical revision)
SEMI E58-0097 (first published)

SEMI E58.1-0697 (Reapproved 0703)
SEMI E58.1-0697 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published June 1999; previously published June 2000.

This document is an overview of the structure and contents of a suite of documents representing an application framework for the Computer Integrated Manufacturing (CIM) systems as used in semiconductor factories. A framework is a software infrastructure that creates a common environment for integrating applications and sharing information in a given domain. The purpose of this framework is to establish an industry standard architecture for complex manufacturing systems, leading to an open, multi-supplier CIM system environment. The framework described in this specification is called the CIM Framework.

The intent of this document is to describe the Manufacturing Execution Systems (MES) domain that is the subject of the CIM Framework and to provide a reference for concepts that are common to the set of documents that specify the CIM Framework. It defines the structure, relationships and interworkings of the components that together comprise the CIM Framework. This architecture defines the partitioning of the CIM Framework components and the responsibilities of each of those components. It also specifies the common abstractions for manufacturing jobs, material, and factory resources that are used consistently throughout the CIM Framework as unifying themes.

The CIM Framework Domain Architecture does not address the dependencies on computing technologies needed to implement these components. These aspects apply more to the realization of the components as software artifacts than to their functionality in terms of semiconductor manufacturing concepts. The technical aspects of the CIM Framework architecture are captured in a separate document, SEMI E96 — Guide for CIM Framework Technical Architecture.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E86 — Provisional Specification for CIM Framework Factory Labor Component
SEMI E96 — Guide for CIM Framework Technical Architecture
SEMI E97 — Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces
SEMI E102 — Provisional Specification for CIM Framework Material Transport and Storage Component
SEMI E133 — Provisional Specification for Automated Process Control Systems Interface

Revision History
SEMI E81-0600 (Reapproved 0307)
SEMI E81-0600 (technical revision)
SEMI E81-0699 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published in 1999; previously published July 2006.

This standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this standard is to facilitate the integration of IBSEM equipment into an automated (e.g., semiconductor fabrication and flat panel display) factory. This document accomplishes this by defining an operational model for IBSEM equipment as viewed by a factory automation controller (Host).

This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional activity that are within the scope of this standard: traffic management characteristics (queuing), parallel interface for carrier transfer (SEMI E23), transport system controller architecture, and delivery of the transfer unit.

The scope of this standard is limited to the usage and description of interbay and intrabay AMHS transport equipment (OHT, OHS, RGT, AGT, DWC) as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 13). It defines the view of the equipment through the SECS communication link. It does not define the internal operation of the equipment. It includes a specific transfer command state model and transport system controller state model as the basis for all equipment of this class.

This document assumes that the GEM fundamental requirements and selected additional capabilities (as specified in § 13) have been implemented on the IBSEM equipment. It expands the GEM standard requirements and capabilities in the areas of state models (TSC, transfer command, vehicle and carrier state models), collection events, alarm documentation, remote commands, data item variables, and material movement.

Referenced SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

Revision History
SEMI E82-1106 (technical revision)
SEMI E82-0706 (technical revision)
SEMI E82-1105 (technical revision)
SEMI E82-0705 (technical revision)
SEMI E82-0305 (technical revision)
SEMI E82-1104 (technical revision)
SEMI E82-0704 (technical revision)
SEMI E82-0304 (technical revision)
SEMI E82-1103 (technical revision)
SEMI E82-0703 (technical revision)
SEMI E82-1102 (technical revision)
SEMI E82-0302 (technical revision)
SEMI E82-1101 (technical revision)
SEMI E82-0701 (technical revision)
SEMI E82-0301 (technical revision)
SEMI E82-0999 (first published)

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published June 1999; previously published March 2005.

Due to the migration to large wafer sizes, future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers, including FOUPs and open cassettes, of increasing weight. The parallel input/output (PI/O) control signals between the production equipment and the AMHS must be better defined for more reliable and efficient carrier handoffs (load/unload) at production equipment load ports.

The purpose of this specification is to enhance the capabilities of the parallel I/O interface defined in SEMI E23 in order to support improvements in the reliability and efficiency of carrier transfer. The enhanced capabilities include continuous handoff, simultaneous handoff, and the capabilities of error detection on the interface.

NOTE: The specifications in this document shall be considered independent from the specifications in SEMI E23; therefore, use of this specification does not require SEMI E23.

The scope of this specification is limited to communications associated with the material handoff operations between the active equipment (e.g., AMHS equipment including AGV, RGV and OHT) and the passive equipment (e.g., production equipment including process and metrology equipment; stockers, etc). This scope also extends to interbay AMHS active equipment (i.e., OHS and stockers equipped with transfer devices) and passive equipment (i.e., OHS and stockers not equipped with transfer devices). This specification defines the enhanced parallel I/O interface signals used to handoff carriers between the production equipment and the AMHS. Figures 1 and 2 show examples of types of AMHS equipment.

This enhanced carrier handoff parallel I/O interface specification includes:
- Signal definition including load port assignment signals (¶ 6.1),
- Carrier handoff sequence definitions and time diagrams (¶ 6.2),
- Error indication, detection, and recovery (¶ 6.3 and ¶ 6.4),
- Connector type, signal, and pin assignment (¶ 6.4), and
- Interface sensor unit size to be located at load port defined by SEMI E15.1 (applicable for systems designed to handle 300 mm wafer carriers).

The enhanced carrier handoff parallel I/O interface controls the handoff of a carrier to and from the passive equipment by the active equipment. This parallel I/O interface only controls the automated handoff operation of the carrier. The handoff is the operation in which a carrier is transferred from one piece of equipment to another. Both the active and passive equipment manage this operation. The factory level controller (i.e., host) does not manage the handoff operation. Figure 3 shows applications for the parallel I/O interface specified in this document.

Referenced SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 Wafers
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E47.1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
SEMI E87 — Specification for Carrier Management (CMS)

Revision History
SEMI E84-1107 (technical revision)
SEMI E84-0305 (technical revision)
SEMI E84-0304 (technical revision)
SEMI E84-0303 (technical revision)
SEMI E84-1102 (technical revision)
SEMI E84-0302 (technical revision)
SEMI E84-1101 (technical revision)
SEMI E84-0701 (technical revision)
SEMI E84-0301 (technical revision)
SEMI E84-1000 (technical revision)
SEMI E84-0200A (technical revision)
SEMI E84-0200 (technical revision)
SEMI E84-0999 (technical revision)
SEMI E84-0699 (first published)

The Factory Labor Component provides the capability to support the qualification and management of available, qualified human resources for manufacturing operations. The technical content of this ballot addresses the portion of the CIM Framework domain specified in SEMI E81, Provisional Specification for CIM Framework Domain Architecture, concerned with management of the availability of qualified factory personnel.

This specification provides the interfaces required by Manufacturing Execution Systems to:
Configure the Person resource model.
- Each Person’s name (or appropriate alias), identification, department, role, etc. There may be cases where identifying information should not be used to associate a person with the required factory labor records.
- Each Person’s initial skills and authorization to perform jobs and access data.
- Each Person’s initial assignment to other factory resources (such as specific machines or factory areas).
- Each Person’s medical qualifications.

Define skill maintenance tasks and what triggers them. Track and report the Person’s skills, authorization, and assignments and record these in the Person’s histories.

Support assignment of Persons to factory jobs and monitor and record job progress (from the perspective of the Person’s role). Monitor skill maintenance triggers (such as expired skill certification) and recommend skill maintenance jobs.

Execute triggered skill maintenance jobs.
- Change Person capabilities (before and after training).
- Execute and monitor skill maintenance jobs (training, certification testing) and report job progress.
- Record skill maintenance triggers and job results in Person’s skill maintenance histories.

Collect and report Person and skill performance (utilization and effectiveness).

Maintain relationships between Persons and system security for identity authentication and authorization.

Specifically, this component provides the services to:
Manage the assignment of qualified and available labor resources for factory operations.
Manage the training and medical requirements for factory operations.
Support the maintenance of personnel information (full name, employee number, department, shift assignment, machines qualified to operate, course and medical examination records).
Support the maintenance of personnel skill qualification histories (courses and medical examinations successfully completed) of factory personnel.

The Factory Labor Component is divided into two subcomponents:
Person Management, which tracks, logs, and maintains availability and task assignment for factory operations personnel within the manufacturing facility. Also provides support for the management of personnel information, training, and medical qualifications.
Skill Management, which provides support for the management of training and medical requirements for factory operations.

Referenced SEMI Standards
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture

Revision History
SEMI E86-0200 (technical revision)
SEMI E86-0999 (first published)

Main Document:
SEMI E87-0707
Specification for Carrier Management (CMS)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007. Originally published 1999; previously published July 2006.

This document provides a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.

This is a standard that covers host and equipment communication for SEMI E15.1 300 mm load ports.

The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this document provides state models and scenarios that define the host interaction with the equipment for the following:
- Carrier transfer between AMHS vehicles and production equipment load ports.
- Carrier transfers to/from production equipment internal buffer space.
- Equipment and load port access mode switching.
- Carrier to load port association.
- CarrierID verification and Carrier slot map verification.

Subordinate Document:
SEMI E87.1-0707
Provisional Specification for SECS-II Protocol for Carrier Management (CMS)

This document maps the services and data of SEMI E87 to SECS-II streams and functions, and data definitions.

This is a provisional specification covering equipment supporting automated access to load ports from the host point-of-view.

The provisional status is required because of the immaturity of implementations of integrated equipment with AMHS, and additional specifications may yet be defined. Also, further exception handling and error recovery scenarios need to be defined.

This document applies to all implementations of SEMI E87 that use the SECS-II message protocol [SEMI E5]. Compliance to this standard requires compliance to both SEMI E87 and SEMI E5.

Referenced SEMI Standards
SEMI E87
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E53 — Event Reporting
SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E90 — Specification for Substrate Tracking
SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

SEMI E87.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15.1 — Provisional Specification for 300 mm Tool Load Port
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E87 — Specification for Carrier Management (CMS)

Revision History
SEMI E87-0707 (technical revision)
SEMI E87-0706E2 (editorial revision)
SEMI E87-0706E (editorial revision)
SEMI E87-0706 (technical revision)
SEMI E87-1105 (technical revision)
SEMI E87-0705 (technical revision)
SEMI E87-0304 (technical revision)
SEMI E87-0703 (technical revision)
SEMI E87-0303 (technical revision)
SEMI E87-0702 (technical revision)
SEMI E87-0302 (technical revision)
SEMI E87-1101 (technical revision)
SEMI E87-0701 (technical revision)
SEMI E87-0301 (technical revision)
SEMI E87-1000 (technical revision)
SEMI E87-0600 (technical revision)
SEMI E87-0200 (technical revision)
SEMI E87-0999 (first published)

SEMI E87.1-0707 (technical revision)
SEMI E87.1-1105 (technical revision)
SEMI E87.1-0702 (technical revision)
SEMI E87.1-0302 (technical revision)
SEMI E87.1-1101 (technical revision)
SEMI E87.1-0701 (technical revision)
SEMI E87.1-0301 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published September 1999; previously published November 2006.

This standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this standard is to facilitate the integration of Stocker SEM equipment into an automated (e.g., semiconductor fabrication and flat panel display) factory. This document accomplishes this by defining an operational model for Stocker SEM equipment as viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, and data reports). Several topics require additional activity that are within the scope of this standard: queuing, parallel interface for carrier transfer [SEMI E23], stocker controller architecture, and scheduling and transport of the transfer unit.

The scope of this standard is limited to the usage and description of AMHS storage equipment (Stockers) as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 13). It defines the view of the equipment through the SECS communication link. It does not define the internal operation of the equipment. It includes a specific transfer command state model and stocker controller state model as the basis for all equipment of this class.

This document assumes that the GEM fundamental requirements and selected additional capabilities (as specified in § 13) have been implemented on the Stocker SEM equipment. It expands the GEM standard requirements and capabilities in the areas of state models (stocker controller, transfer command, carrier and stocker crane state models), collection events, alarm documentation, remote commands, data item variables, and material movement.

Referenced SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

Revision History
SEMI E88-0307 (technical revision)
SEMI E88-1106 (technical revision)
SEMI E88-0706 (technical revision)
SEMI E88-1104E (editorial revision)
SEMI E88-1104 (technical revision)
SEMI E88-0704 (technical revision)
SEMI E88-0304 (technical revision)
SEMI E88-1103 (technical revision)
SEMI E88-0703 (technical revision)
SEMI E88-0303 (technical revision)
SEMI E88-1102 (technical revision)
SEMI E88-0702 (technical revision)
SEMI E88-0302 (technical revision)
SEMI E88-1101 (technical revision)
SEMI E88-0701 (technical revision)
SEMI E88-0301 (technical revision)
SEMI E88-0999 (first published)

Main Document:
SEMI E90-0707
Specification for Substrate Tracking

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007. Originally published September 1999; previously published July 2006.

The purpose of this standard is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This standard defines the concepts and behaviors for the information management of substrates, as well as the messages/services.

Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This standard addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.

The scope of this standard is to define the information services of equipment that can be requested by the user. To clarify required services, the concepts and behaviors of the substrate, the substrate location, the batch and the batch location are defined.

This standard is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system must be integrated by means of a communication link.

Subordinate Document:
SEMI E90.1-0706
Provisional Specification for SECS-II Protocol Substrate Tracking

This document maps the services and data of SEMI E90 to SECS-II streams and functions, and data definitions.

This is a specification covering equipment supporting automated substrate tracking.

This document applies to all implementations of SEMI E90 that use the SECS-II message protocol [SEMI E5]. Compliance to this standard requires compliance to both SEMI E90 and SEMI E5.

This standard is provisional. To have the provisional status removed, the following must be completed:
- Table 1, Services Message Mapping Table
- Table 3, Services Parameters to SECS-II Data Items Mapping

Referenced SEMI Standards
SEMI E90
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E53 — Event Reporting
SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E53 — Event Reporting

Revision History
SEMI E90-0707 (technical revision)
SEMI E90-0706 (technical revision)
SEMI E90-0306 (technical revision)
SEMI E90-1105 (technical revision)
SEMI E90-0705 (technical revision)
SEMI E90-1104E2 (editorial revision)
SEMI E90-1104E (editorial revision)
SEMI E90-1104 (technical revision)
SEMI E90-0304 (technical revision)
SEMI E90-0703 (technical revision)
SEMI E90-0303 (technical revision)
SEMI E90-1102 (technical revision)
SEMI E90-0702 (technical revision)
SEMI E90-0302 (technical revision)
SEMI E90-1101 (technical revision)
SEMI E90-0701 (technical revision)
SEMI E90-0301 (technical revision)
SEMI E90-1000 (technical revision)
SEMI E90-0600 (technical revision)
SEMI E90-0200 (technical revision)
SEMI E90-0999 (first published)

SEMI E90.1-0706 (technical revision)
SEMI E90.1-0705 (technical revision)
SEMI E90.1-1104 (technical revision)
SEMI E90.1-0703 (technical revision)
SEMI E90.1-0303 (technical revision)
SEMI E90.1-1102 (technical revision)
SEMI E90.1-0702 (technical revision)
SEMI E90.1-0701 (technical revision)
SEMI E90.1-0301 (first published)

This document establishes a Specific Equipment Model for prober equipment (PSEM). The PSEM consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented in addition to the fundamental requirements and additional capabilities specified in SEMI E30 (GEM). The intent of this document is to facilitate the integration of prober equipment into an automated semiconductor factory. This document accomplishes this by defining an operational model for prober equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior. The scope of this document is limited to the definition of prober equipment behavior as perceived by a Semiconductor Equipment Communications Standard (SECS-II) (SEMI E5) host that complies with GEM.

The document defines the view of the equipment through the SECS communications link, but does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class. This document requires that the GEM fundamental requirements and applicable additional capabilities have been implemented on the prober equipment. This document expands GEM Standard requirements and capabilities in the areas of the processing state model, collection events, remote commands, data item variables and process program management, and adds Prober Job state model to GEM Standard requirements and capabilities. This document does not include the definition of the treatment of Multiple Stage. This document applies to the class of prober equipment in which the wafer is unloaded from the same slot in the same carrier which loaded the wafer after processing.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI M20 — Specification for Establishing a Wafer Coordinate System
SEMI M21 — Specification for Assigning Addresses to Rectangular Elements in a Cartesian Array

Revision History
SEMI E91-0600 (technical revision)
SEMI E91-0999 (first published)

Main Document:
SEMI E94-0308
Specification for Control Job Management

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008. Originally published February 2000; previously published November 2007.

This specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.

This specification may be applied to equipment that is compliant to SEMI E30 (GEM). However, it is also intended that this standard will be useful for future generation equipment interfaces that supercede SEMI E30, such as SEMI E53.

Subordinate Document:
SEMI E94.1-1107
Specificiation for SECS-II Protocol for Control Job Management (CJM)

This document maps the services and data of SEMI E94 to SECS-II streams and functions and data definitions.

This is a specification covering equipment supporting automated control job management.

This document applies to all implementations of SEMI E94 that use the SECS-II message protocol [SEMI E5]. Compliance to this standard requires compliance to both SEMI E94 and SEMI E5.

Referenced Standards:
SEMI E94
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E53 — Event Reporting

SEMI E94.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E40 — Standard for Processing Management (PJM)
SEMI E53 — Event Reporting (ER)
SEMI E94 — Provisional Specification for Control Job Management (CJM)

Revision History:
SEMI E94-0308 (technical revision)
SEMI E94-1107 (technical revision)
SEMI E94-1106 (technical revision)
SEMI E94-0306 (technical revision)
SEMI E94-0705 (technical revision)
SEMI E94-1104 (technical revision)
SEMI E94-0702 (technical revision)
SEMI E94-0302 (technical revision)
SEMI E94-1101 (technical revision)
SEMI E94-0701 (technical revision)
SEMI E94-1000 (technical revision)
SEMI E94-0200 (first published)

SEMI E94.1-1107 (technical revision)
SEMI E94.1-1104 (technical revision)
SEMI E94.1-1101 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published February 2000; previously published November 2001.

This standard addresses the area of processing content with the direct intention of developing common software standards, so that problems involving operator training, operation specifications, and efficient development can be resolved more easily.

This standard is written to be “tool-neutral” without reference to, or reliance on, specific capabilities of platforms or operating systems. Neither is it intended that choices of software tools or detailed implementation strategies be dictated.

Note that all figures in this standard are schematic, are not drawn to scale, and unless otherwise specified, are not intended to provide implementation details about number of buttons, button sizes, panel sizes, etc.

This standard specification applies to manufacturing equipment used in the production of semiconductors.

This standard may be applicable to other areas such as the manufacture of flat panel displays, but specific application to these areas is outside the scope of this document.

Referenced SEMI Standards
None.

Revision History
SEMI E95-1101 (Reapproved 0307)
SEMI E95-1101 (technical revision)
SEMI E95-0200 (first published)

This guide describes technical architecture choices that enable application components to cooperate in a Computer Integrated Manufacturing (CIM) environment and reduce the effort required to integrate those components into a working solution. The CIM Framework technical architecture guide builds on publicly available specifications for distributed object computing. It defines manufacturing production systems requirements for the technical infrastructure needed for improved component interoperability, substitutability, and extensibility. It provides guidance for specifying components and addresses options for using an underlying distributed object communication infrastructure. This document is intended for developers of components and applications, and integrators of MES systems that adhere to the CIM Framework specifications. It is also intended for system architects who contribute to the evolution of the CIM Framework architecture and guides based on implementation experience. A guide for technical architecture is focused on the software technologies that support the architectural goals for the CIM Framework rather than on the manufacturing domain concepts that the CIM Framework encompasses. The technical architecture perspective complements SEMI E81.

Referenced SEMI Standards
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture

Revision History
SEMI E96-1101 (Reapproved 0307)
SEMI E96-1101 (technical revision)
SEMI E96-0200 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007. Originally published February 2000.

NOTICE: This document was published twice during the February 2000 (0200) publishing cycle.

This document defines the global declarations used by all other components of the CIM Framework and also specifies the common architecture patterns that serve to functionally integrate CIM Framework components. The material architecture defines functionality common to product management, durables management and consumables management components.

The factory resource architecture defines relationships and common functionality of a variety of factory resources. The job architecture defines a factory-wide model for controlling factory jobs that drive a variety of manufacturing tasks. These specifications are separated into a distinct group to enable them to be specified once and then logically included or inherited wherever they are subsequently needed.

This specification provides the common interfaces required by Manufacturing Execution Systems to:
- Provide type definitions for common data structures to ensure consistent representation. These items include data types for common concepts such as coordinates, priorities, timestamps, and sequences of basic data types.
- Provide definitions for common exceptions used consistently throughout the CIM Framework.
- Provide the material architecture interfaces common to identifying, grouping, moving, locating and tracking material in the factory.
- Provide the factory resource architecture interfaces common to defining, organizing, tracking usage of and maintaining factory resources including equipment, sensors, durables, and people.
- Provide the job architecture interfaces common to creating, executing and managing work in the factory. The job architecture is specialized for material processing jobs, material transport jobs, resource maintenance jobs and factory jobs that drive product material through their process flows.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture

Revision History
SEMI E97-0200A (Reapproved 0307)
SEMI E97-0200A (technical revision)
SEMI E97-0200 (first published)

Main Document:
SEMI E98-1106
Provisional Standard for the Object-Based Equipment Model (OBEM)

This provisional standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006 and on CD-ROM in November 2006. Originally published in February 2000; previously published November 2002.

Purposes of the Object-Based Equipment Model include the following: Define a standard model for interfacing to multi-process equipment and other complex equipment.

Define standard equipment components so that communications can “discuss” component-related issues.

Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM-compliant equipment to a Machine object.

The purpose of the Object-Based Equipment Model (OBEM) standard is to provide definitions, services, and behavior, as seen through communications with the factory, for the common types of physical and logical objects of which equipment is typically composed, including the equipment itself. The definition of standardized objects allows the equipment to describe its makeup to the factory and provides the factory visibility into the equipment.

This is a provisional standard that defines concepts, behavior, and services to support the integration of production equipment within a semiconductor factory. The scope of this standard includes all semiconductor manufacturing equipment that provides an interface to the factory host systems. Some services may not be applicable to some material handling systems.

Sections that must be completed in order for the provisional status of OBEM to be removed include the following:
§ 11.2 - Access Management
§ 14 - OBEM Compliance

Detail standards will also be added in the future to specify OBEM mappings to different protocols such as SECS-II, CORBA IDL, and DCOM.

Subordinate Document:
SEMI E98.1-1102
Provisional Specification for SECS-II Protocol for the Object-Based Equipment Model

This document maps the services and data of SEMI E98 Object-Based Equipment Model (OBEM) to SECS-II streams and functions and data definitions. This document applies to all implementations of OBEM that use the SECS-II message protocol (SEMI E5). This specification is provisional. To remove the provisional status, the SECS-II format for the attributes of the remaining object defined in OBEM must be included in § 6: EquipmentIODevice.

Referenced SEMI Standards
SEMI E98
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Provisional Specification for 300 mm Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E54 — Sensor/Actuator Network Standard
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management

SEMI E98.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)

Revision History
SEMI E98-1106 (technical revision)
SEMI E98-1102 (designation update)
SEMI E98-0302 (technical revision)
SEMI E98-1101 (technical revision)
SEMI E98-0701 (technical revision)
SEMI E98-1000 (technical revision)
SEMI E98-0600 (technical revision)
SEMI E98-0200 (first published)

SEMI E98.1-1102 (technical revision)
SEMI E98.1-0302 (technical revision)
SEMI E98.1-1101 (first published)

This provisional specification was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published June 2000.

Wafer fabrication factories will require the baseline capabilities of stocker storage and interbay transport. In addition to these baseline capabilities, intrabay transport will be added as a result of ergonomic and safety requirements brought about by the increased size and weight of 300 mm wafer carriers. These stocker, interbay transport, and intrabay transport systems will be required to be fully integrated with each other and the factory Manufacturing Execution System (MES) in order to realize the full vision of cost effective automated material transport to and from production equipment.

A baseline requirement of Automated Material Handling System (AMHS) equipment is efficient integration with the factory MES. Therefore, the purpose of this specification is to enable cost effective integration of interoperable AMHS systems, as illustrated in Figure 1. Manufacturers require a SEMI standard which specifies the visible behavior of the AMHS Integration system and its interface to the factory MES. The purpose of this standard is to specify these interfaces and the interactions between MES and AMHS systems as a part of the CIM Framework. While the term AMHS is commonly used to refer to a wide range of equipment and systems that support automated material handling, the CIM Framework specifies a software component called "Material Transport and Storage Component (MTSC)" which represents the standard interface of the MES to the complete suite of AMHS capabilities.

This specification provides the common interfaces required by Manufacturing Execution Systems for runtime interactions between the factory (as represented by other CIM Framework components) and the Material Tracking and Storage Component. Some interfaces supporting configuration and tracking of the material transport and storage equipment are the responsibility of the Equipment Tracking and Maintenance component of the CIM Framework. These interfaces are complementary to the interfaces of Transport Machines and Storage Machines presented in this specification.

The responsibilities of the Material Transport and Storage Component include interfaces that
- Support scheduling of material transport and processing by predicting time for material delivery to specific locations.
NOTE: The interfaces for delivery time prediction are deferred as one of the deficiencies noted in this provisional specification.
- Execute and monitor transport jobs to move material to specific locations.
- Validate that the job can be done: the material is available, the destination is reachable and has available storage or loadport capacity, and there are sufficient material movement resources (cars, storage space, etc.) to implement the job.
- Request operations from AMHS equipment controllers to enact internal material movement and storage actions. Implementations of the Material Transport and Storage Component will use lower level standards such as IBSEM and StockerSEM for communication with equipment that performs the physical movement and storage actions.
- Collect and record data on transport job execution and history.
- Capture, record, interpret, and respond to equipment events and fault detection.
- Generate MES-level job status events and material location change events.
- Record and report on material locations and material transport histories for material in the system.
- Interact with machine and port interfaces for material hand-off handshake protocols.

Automated Material Handling Systems (AMHS’s) are an important part of any semiconductor factory and have, typically, been implemented and integrated with a Manufacturing Execution System (MES) as a separate logical software entity. An AMHS is made up of the AMHS Framework, the system controllers for AMHS equipment (the software) and the transport and storage machines (the hardware). In keeping with this tradition, the CIM Framework views the AMHS as a "black box" where the interface into that system is visible, but the inner workings and control of that system is the responsibility of the AMHS supplier and not in the domain of the MES. The CIM Framework specifies the Material Transport and Storage Component (MTSC) as the MES level interface to AMHS capabilities.

Reference SEMI Standards
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture

Revision History
SEMI E102-0600 (Reapproved 0706)
SEMI E102-0600 (first published)

This specification was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the Japanese Regional Standards Committee on February 1, 2001. Initially available at www.semi.org April 2001; to be published July 2001. Originally published October 2000.

The Scheduling Component supports Factory Operations, Material Transport and Storage, Production Machine, and Equipment Tracking and Maintenance components by ordering, in time, jobs that process material on equipment, move material, and maintain equipment. The scheduler uses knowledge of product demand, equipment and material state, process flows, throughput bottlenecks, operational policy and constraints, and other information to recommend jobs that maximize effective utilization of factory resources to satisfy product demand and planned objectives. Increased control over operations requires an active Scheduling Component that can respond to factory events and changes in state and dynamically adjust the schedules for material processing, material transport and equipment maintenance. The Scheduling Component can react to inventory levels of material in the factory to adjust priorities to minimize queue sizes and ensure that use of bottleneck equipment is optimized to keep WIP inventory levels at desired levels. The Scheduling Component can minimize turn around time (TAT) by coordinating material transport (for substrates and durables) with processing to reduce equipment idle time. The Scheduling Component can sequence activities to minimize setup time. It can also respond to scheduled and unscheduled equipment down-time to minimize impact on turn around time. In addition to minimizing overall TAT, it can react to the priorities for urgent lots to move them through the process flow in the minimum possible time while adjusting the schedules of lower-priority lots that are impacted.

The primary run-time responsibilities of the Scheduling Component are to monitor resource and material state and apply scheduling and dispatching decision mechanisms to identify the next activity (dispatching) or sequence of activities (scheduling) for factory resources. The Scheduling Component includes an interface that supports both scheduling and dispatching. Figure 1 illustrates the interactions between the Scheduling Component and other components of the CIM Framework. This illustration does not reflect all of the many inputs to the Scheduling Component that are required to provide it with the current status of the factory resources. As described in this standard, the Scheduling Component produces activity option and activity forecast lists. These lists are produced by combining the factory model and status information from other components with scheduling policies in the Scheduling Component. For example, the Scheduling Component combines data from the Specification Component on how products are made with status data from the Equipment and Product Management Components to give activity options for a machine. The Factory Operations Component uses the Scheduling Component services to orchestrate the man-agement of machines and production of lots. For example, when a tool becomes available, Factory Operations uses the Activity Options list to select the next lot to process on the tool. Factory Operations then works with other components to execute the production job for the lot on the machine. Executing the production job changes the state of lot and tool in other components. These status changes are then used by the Scheduling Component when it produces new activity lists. The Scheduling Manager supports Factory Operations by providing an answer to questions like, "What is next for this material or resource?" The answer may be based on evaluation of current or future constraints and objectives. Although the dispatcher's output takes the form of a decision for the next activity for the target resource, the interface may also support manual scenarios by providing a list of prioritized activities from which the decision is selected. The Scheduling Manager interface also provides forecasts of future activities projected to occur after the next activity. By simulating anticipated future activity sequencing and execution timing the scheduler can generate forecasts that predict future responses from the dispatcher for subsequent requests. These forecasts are subject to change as factory conditions change, but they offer the best current projection of future activity decisions. This specification does not describe the definition of the policies used by the Scheduling Component to produce activity lists. This is left to component implementors.

Referenced SEMI Standards
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture
SEMI E97 — Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces
SEMI E102 — Provisional Specification for CIM Framework Material Transport and Storage Component

Revision History
SEMI E105-0701 (technical revision)
SEMI E105-1000 (first published)

This specification was technically approved by the Global Information & Control Committee and is the direct responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese Regional Standards Committee on July 19, 2002. Initially available at www.semi.org October 2002; to be published November 2002. Originally published March 2001; previously published November 2001.

The objective of this document is standardization of the specific data format passed from the test equipment to the Yield Management System. The Yield Management System is a kind of data server for detail test data and geometrical defect data of patterns on a wafer as described in the Terminology section of this document. This document assumes a Yield Management System in which test equipment electrical failure information is managed and analyzed in an integrated manner. Examples of test equipment failure information include bit map data, bin data, and inpsection information obtained by devices such as wafer inspection equipment and review tools. Standardization of the data file format helps to reduce the development burden on customers and related vendors. This document specifies the data file format for transferring from test equipment to a Yield Management System.

This document is an extension of the general map data item standard, i.e., SEMI G81, and the general map data format document, currently under development.

This document does not redefine the general specification. The scope of this document is just defining data items and their formats. Data file creation methods, data creating environments and file naming conventions are outside of the scope of this document. Also, communication protocols to transfer the data are beyond the scope of this document.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)
SEMI G81 — Specification for Map Data Items
SEMI G85 — Specification for Map Data Format

Revision History
SEMI E107-1102 (technical revision)
SEMI E107-1101 (technical revision)
SEMI E107-0301 (first published)

Main Document:
SEMI E109-0305
Specification for Reticle and Pod Management (RPMS)

This specification was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on December 10, 2004. Initially available at www.semi.org February 2005; to be published March 2005. Originally published July 2001; previously published November 2004.

This document provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles within the equipment, identification and verification of both reticle pods and reticles, inspection and qualification of reticles, and other relevant information such as tracking reticle usage. This is a standard that covers host and equipment communication for equipment that handles reticles. This only includes equipment that handles reticles both in and outside of a reticle pod. The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and manual reticle pod transfers, reticle transfers to and from the reticle pod, internal reticle movement, identification and verification of ReticleID, inspection and qualification of reticles, and tracking reticle usage. Specifically, this document provides state models and scenarios that define the host interaction with the equipment for the following:
- Reticle pod transfer between AMHS vehicles and production equipment, bare reticle stockers, and reticle inspection equipment reticle load ports.
- Reticle transfers to/from lithography production equipment internal reticle library space.
- Equipment and reticle load port access mode switching.
- Reticle Pod to load port association.
- Reticle Pod ID verification and Reticle Pod slot map verification.

Subordinate Document:
SEMI E109.1-0704
Provisional Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)

This document maps the services of SEMI E109 to SECS-II streams and functions. This document also maps the data of SEMI E109 to E5 data definitions. This is a provisional standard that covers host and equipment communication for equipment that handle reticles. This includes equipment that handle reticles both inside and outside of a reticle pod. The provisional status is required because of the immaturity of implementations of integrated equipment with Automated Material Handling Systems (AMHS) or Automated Reticle Handling Systems (ARHS). Additional specifications may be defined to add further functionality.

Also, further exception handling and error recovery scenarios need to be defined. This document applies to all implementations of SEMI E109 that use SECS-II message protocol (SEMI E5). Compliance to this standard requires compliance to both SEMI E109 and SEMI E5.

Referenced SEMI Standards
SEMI E109
SEMI E15 — Specification for Tool Load port
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concept, Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E53 — Event Reporting
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O interface
SEMI E99 — Carrier ID Read/Write Functional Standard
SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles

SEMI E109.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E109 — Specification for Reticle and Pod Management (RPMS)

Revision History
SEMI E109-0305 (technical revision)
SEMI E109-1104 (technical revision)
SEMI E109-0704 (technical revision)
SEMI E109-0703 (technical revision)
SEMI E109-1102 (technical revision)
SEMI E109-0302 (technical revision)
SEMI E109-0701 (first published)

SEMI E109.1-0704 (technical revision)
SEMI E109.1-0703 (technical revision)
SEMI E109.1-1102 (technical revision)
SEMI E109.1-0302 (first published)

Main Document:
SEMI E120-0706
Specification for the Common Equipment Model (CEM)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published March 2003; previously published July 2005.

The purpose of this specification is to provide a generally applicable object model of semiconductor equipment structure. This object model is intended to be used in the following ways:
- As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host.
- As a base model to be used and extended by other SEMI equipment communication standards.
- As a reference for the creation of technology-specific object model definitions, such as XML schema.

This specification provides a common set of constructs that can be used by the equipment manufacturer to model their equipment structure.

This specification defines the classes, attributes, relationships, and other detail appropriate for the model of an equipments structure as viewed by a factory host application through the available communication interfaces.

The model contained in this specification documents features of the equipment structure considered necessary for more than one (current or future) equipment communication standards.

Subordinate Document:
SEMI E120.1-0705
XML Schema for the Common Equipment Model (CEM)

The purpose of this specification is to provide an XML schema that corresponds to the UML model for equipment defined by SEMI E120. This schema is available to equipment communication standards that want to use CEM-defined equipment structural information in XML formatted equipment communication.

The scope of this document is the faithful representation of the CEM model in an XML schema. It will not add new domain information or concepts to the model. The only additions made are those needed to render a useful XML schema.

Referenced SEMI Standards
SEMI E120.1
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing applications

Revision History
SEMI E120-0706 (technical revision)
SEMI E120-0705E (editorial revision)
SEMI E120-1104E (editorial revision)
SEMI E120-0704 (technical revision)
SEMI E120-0304 (technical revision)
SEMI E120-0703 (technical revision)
SEMI E120-0303 (first publication)

SEMI E120.1-0706 (technical revision)
SEMI E120.1-0705 (technical revision)
SEMI E120.1-1104 (technical revision)
SEMI E120.1-0704 (first published)

This guide was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information and Control Committee. Current edition approved by the North American Regional Standards Committee on November 4, 2004 and December 10, 2004. Initially available at www.semi.org February 2005; to be published March 2005. Originally published March 2003; last published March 2004.

The inclusion of XML (Extensible Markup Language) notation within current SEMI standards reflects the industry's growing interest in XML technology.

This guide is the first step to prepare for XML protocols in SEMI standards and to establish consistency in XML style and usage. Recommendations given in this document are intended for the definition and conformance of XML based standards.

This document also attempts to highlight those areas where standardization and further work may be required.

This guide is intended to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts. It addresses an approach for the usage and definition of XML specifications within the semiconductor industry with the focus on the use of XML in future SEMI standards.

These guidelines should be applied to any XML document or schema generated as part of a SEMI standard for communication between software entities.

This guide includes the following: Overview of XML Resources, Organizations, and Standards; XML Three Tier Model Architecture; and General and specific recommendations of XML style and usage.

Referenced SEMI Standards
None.

Revision History
SEMI E121-0305 (technical revision)
SEMI E121-0304 (technical revision)
SEMI E121-0703 (technical revision)
SEMI E121-0303 (first published)

Main Document:
SEMI E122-0703
Standard for Tester Equipment Specific Equipment Model (TSEM)

This standard was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information and Control Committee. Current edition approved by the North American Regional Standards Committee on November 22, 2002. Initially available at www.semi.org January 2003; to be published March 2003.

NOTICE: This standard replaces SEMI E30.3, which has been removed from publication as of the March 2003 (0303) publication cycle.

NOTICE: The designation of SEMI E122 was updated during the 0703 publishing cycle to reflect the addition of SEMI E122.1.

This document establishes a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment. These characteristics and behaviors are required to be implemented. The intent of this document is to facilitate the integration of testing equipment into an automated semiconductor factory.

This document accomplishes this by defining an operational model for testing equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior. The document defines the view of the equipment through the host communications link but does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.

This document expands testing equipment requirements and capabilities in the areas of the processing state model, collection events, alarm documentation, remote commands, variable items, and process program management.

Subordinate Document:
SEMI E122.1-0703
Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)

This document maps the services and data of SEMI E122 to SECS-II streams and functions, and data definitions. This is a specification covering equipment supporting automated control job management. This document applies to all implementations of SEMI E122 that use the SECS-II message protocol (SEMI E5). Compliance to this standard requires compliance to both SEMI E122 and SEMI E5.

Referenced SEMI Standards
SEMI E122
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI E122.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E122 — Standard for Tester Equipment Specific Equipment Model (TSEM)

Revision History
SEMI E122-0703 (technical revision)
SEMI E122-0303 (first published)

SEMI E122.1-0703 (first published)

Main Document:
SEMI E123-0703
Standard for Handler Equipment Specific Equipment Model (HSEM)

This standard was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information and Control Committee. Current edition approved by the North American Regional Standards Committee on November 22, 2002. Initially available at www.semi.org January 2003; to be published March 2003.

NOTICE: The designation of SEMI E123 was updated during the 0703 publishing cycle to reflect the addition of SEMI E123.1.

NOTICE: This standard replaces SEMI E30.2, which has been removed from publication as of the March 2003 (0303) publication cycle.

This document establishes a Specific Equipment Model (SEM) for Handling equipment (HSEM). The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment. The intent of this document is to facilitate the integration of Handling equipment into an automated (semiconductor) factory.

This document accomplishes this by defining an operational model for Handling equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior. The scope of this document is limited to the definition of Handling equipment behavior as perceived by a host. It defines the view of the equipment through the equipment communications interface. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.

This document expands the handler equipment requirements and capabilities in the areas of the processing state model, collection event, alarm documentation, remote commands, variable item, and process program management.

Subordinate Document:
SEMI E123.1
Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)

This document maps the services and data of SEMI E123 to SECS-II streams and functions, and data definitions. This is a specification covering equipment supporting automated communication of the handler equipment. This document applies to all implementations of SEMI E123 that use the SECS-II message protocol (SEMI E5). Compliance to this standard requires compliance to both SEMI E123 and SEMI E5.

Referenced SEMI Standards
SEMI E123
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

Referenced SEMI Standards
SEMI E123.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E123 — Standard for Handler Equipment Specific Equipment Model (HSEM)

Revision History
SEMI E123-0303 (first published)

SEMI E123.1-0703 (first published)

Main Document:
SEMI E125-0308
Specification for Equipment Self Description (EqSD)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published July 2003; previously published March 2007.

NOTICE: The designation of SEMI E125 was updated during the 0308 publishing cycle to reflect the changes to SEMI E125.1.

This specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory’s automation system.

In-scope - This document specifies the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment. The specification only describes information that is static in nature (i.e., information that does not change dynamically while the equipment is running). This document also specifies an interface that clients can use to access this information.

This specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI specification for Data Collection Management.

Out of Scope - This specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration, interfaces, and available data, and keeping this information current.

The details of any underlying concepts and behavioral models (e.g., carrier management, process/control job, etc.) that can be described by metadata are to be separately specified in a document dedicated to those concepts. Only the ability to describe the fact that a supplier has implemented such a concept and that a client can discover this implementation and any data it can produce is in scope for this specification.

This specification does not require that the metadata provided by the equipment be directly human readable. It is expected that applications will be written to organize and present this information to human users in a form that is easier for end users to digest.

Subordinate Document:
SEMI E125.1-0308
Specification for SOAP Binding for Equipment Self Description (EqSD)

SOAP Implementation Mapping - The purpose of this specification is to provide an implementation mapping of the SEMI E125 specification to the SOAP 1.1 protocol. This document provides a description of the XML Schema data types used to support the UML classes defined in SEMI E125, and also describes the WSDL port type and binding definitions used to support the operations defined by the interfaces specified in SEMI E125.

Specification Scope - The scope of this specification is the representation of the EqSD model in an XML Schema and corresponding WSDL port types and bindings. It will not add new domain information or concepts to the SEMI E125 model. The only additions made are those needed to render useful WSDL or XML Schema.

This specification requires SEMI E132 authentication, and defines requirements for the application of SEMI E132 concepts to the SEMI E125 specification.

Referenced Standards:
SEMI E125
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concept, Behavior, and Services
SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125.1
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML

Revision History:
SEMI E125-0308 (designation update)
SEMI E125-0307 (technical revision)
SEMI E125-0306 (technical revision)
SEMI E125-1105 (technical revision)
SEMI E125-0305 (designation update)
SEMI E125-1104 (technical revision)
SEMI E125-0704 (technical revision)
SEMI E125-0304 (technical revision)
SEMI E125-0703 (first published)

SEMI E125.1-0308 (technical revision)
SEMI E125.1-1107 (technical revision)
SEMI E125.1-0307 (technical revision)
SEMI E125.1-1105 (technical revision)
SEMI E125.1-0305 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published July 2003; previously published March 2008.

This standard identifies key equipment quality information parameters, or EQIPs, for equipment process types or groups. The identification of these quality parameters is intended to help equipment users and suppliers specify and utilize capabilities for process control.

This standard is designed to be updated as EQIPs are identified for new and/or existing equipment process types in this standard.

Intended Audience — This standard is intended for use by OEMs, users, and third party equipment and process control system suppliers who need to achieve equipment and process control of select process quality parameters, utilizing standardized methods for actuation of process control parameters.

The scope of this standard is limited to identifying key EQIPs for select equipment process types, specifying that the equipment shall indicate a non-null list of settable process program parameters that impact each of these EQIPs, and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods. The standard is not intended to identify all quality parameters. It is not intended to specify a complete set of equipment types.

While this standard requires that a capability shall exist for actuation of process program parameters to influence key EQIPs, the standard does not specify how this actuation will take place. For example, it does not define the communication protocol for actuation or the equipment or host models that will support and enable this actuation capability. The scope is limited to defining the key EQIPs and their linking to process program parameters.

The standard is structured so that EQIPs for equipment types may be added to an existing set, as the community reaches consensus on these additions. Further, EQIPs may be defined for a new equipment type not previously addressed in this standard. Additions to the standard are made utilizing the SEMI standards balloting process.

Referenced Standards:
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Specification for Control Job Management
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)

Revision History:
SEMI E126-0708 (technical revision)
SEMI E126-0308 (technical revision)
SEMI E126-0305 (technical revision)
SEMI E126-0704 (technical revision)
SEMI E126-0703 (technical revision)
SEMI E126-0703 (first published)

Main Document:
SEMI E127-0308
Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008. Originally published July 2003; previously published November 2007. The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process monitoring through rapid access to measurement data, reduce material handling between process and measurement equipment, and the opportunity to increase process monitoring with minimal or no decrease in throughput. The benefits of integrated measurement also allow Advanced Process Control systems to use the results with reduced feedback lag time.

The purpose of the IMMC specification is to provide an object-based specification of an Integrated Measurement Module together with a standard interface between an integrated measurement module and its control and data ports where these are commonly implemented by different suppliers. The interface allows access to the properties and services of specific objects. This will facilitate the effort needed for the integration of the module into a larger system.

An additional purpose of this standard is to provide sufficient information through a combination of on-line services and interface documentation that an IMMC-compliant integrated measurement module may be integrated with multi-module equipment without requiring a software change in either the module or the equipment. This may require configuration changes made by the end-user through the equipment user interface where certain options are left to the module supplier.

The Integrated Measurement Module Communications specification covers concepts, behaviors, and services to be provided by a metrology or inspection module so that it may be integrated into production equipment intended for large substrates processing. However, nothing should preclude its application to smaller substrate manufacturing.

Subordinate Document:
SEMI E127.1-0308
SPECIFICATION FOR SECS-II PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC)

This document maps the services and data of IMMC to SECS-II streams and functions and data definitions.

This document applies to all implementations of IMMC that use the SECS-II message protocol (SEMI E5).

Referenced Standards:
SEMI 127
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30.5 — Specification for Metrology Specific Equipment Model (MSEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E90 — Specification for Substrate Tracking
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E116 — Provisional Specification for Equipment Performance Tracking
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI E148 — Specification for Time Synchronization and Definition of the Clock Object
SEMI M20 — Specification for Establishing a Wafer Coordinate System

SEMI 127.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E90.1 — Provisional Specification for SECS-II Protocol Substrate Tracking
SEMI E127 — Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

Revision History:
SEMI E127-0308 (technical revision)
SEMI E127-1107 (technical revision)
SEMI E127-0307 (technical revision)
SEMI E127-0705 (technical revision)
SEMI E127-0305 (technical revision)
SEMI E127-1104 (technical revision)
SEMI E127-0704 (technical revision)
SEMI E127-0304 (technical revision)
SEMI E127-0703 (first published)

SEMI E127.1-0308 (technical revision)
SEMI E127.1-0705 (technical revision)
SEMI E127.1-1104 (technical revision)
SEMI E127.1-0304 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published July 2003.

E This standard was editorially modified in September 2006 to correct typographical errors in figure number references. Changes were made to ¶¶ 6.6.1-6.6.7.

This standard specifies XML structures required to encode message header or "envelope" information for synchronous and asynchronous messages. XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas. XML is also used to structure information needed to route and deliver messages between applications. A standard for message headers is required to avoid development and use of multiple incompatible protocols based on XML. This specification will be referred to as "The XML Messaging Specification".

The XML Messaging Specification provides definitions of message headers needed for messages exchanged in an asynchronous or synchronous fashion. Synchronous message delivery is chosen when application communication requires message consumption and execution to be completed before a new message is allowed. Asynchronous messages are delivered independently without dependence on transport technology to correlate related messages. The rationale for choosing an asynchronous message delivery mechanism is based on the characteristics of the interaction between two software systems. Some of these reasons are that:
- Support for long-running Request/Reply interactions may not be practical in a synchronous session-oriented communication.
- Some messaging interactions require additional callback messages reporting on server activity which supplement the reply message.
- Clients may wish to interleave requests and replies to manage parallel or overlapping activities in multiple concurrent messaging conversations.

Headers defined for asynchronous messaging may also support synchronous interactions that rely on transport sessions for identification and correlation of related messages. However, there may be benefits of using the message header elements specified here even in synchronous interactions. The message header elements provide self describing information about messages that may be useful for debugging or tracking message traffic. Their use may also enable future migration to different message transports.

The XML Messaging Specification uses established, openly referenceable industry standards for XML messaging where possible. It only specifies extensions to existing industry standards when needed to meet the immediate requirements for messaging in a SEMI Standard application context. The intent of this standard is not to replicate existing standards or offer competing specifications, but to align with and cite the usage of existing standards.

In Scope - The XML Messaging Specification will include within its scope the following:
Use of the W3C Simple Object Access Protocol (SOAP) - SOAP is used as a basic message foundation for SEMI messaging applications.

Definition of SOAP Extensions - This specification defines SOAP extensions for header and body elements needed to support synchronous and asynchronous messaging interactions.

Structures for Request/Reply Point-to-Point Message Dialogs - This specification addresses the message header data needed to support request/reply interactions with a request message and corresponding reply message.

Structures for Asynchronous Point-to-Point Callback Messages - This specification addresses the message header data needed to enable atomic, callback messages that complement a request/reply dialog between two endpoints.

Structures for Multicast Event Messages - This specification addresses the message header data needed to enable atomic, event messages distributed via a publication multicast to multiple subscribers.

Use of W3C Web Services Definition Language (WSDL) - WSDL is a message metadata specification language for describing signatures of web service interfaces. This specification will define how WSDL will be used to represent the interfaces intended for synchronous and asynchronous message exchange patterns.

Out of Scope - The following topics are beyond the scope of this specification. These topics may be addressed in separate specifications, but are not intended as future additions to this standard.

Message Security - The specification does not provide mechanisms for authentication of the message sender or receiver or for securing the content of messages from unauthorized access.

Quality of Performance - The XML Messaging Specification does not provide performance requirements or conformance testing for the performance characteristics of message transports. There may be environments in which XML messaging structures are not appropriate or effective for high performance communications. The definition of the environments where XML Messaging may or may not be appropriate is beyond the scope of this document.

Referenced SEMI Standards
None.

Revision History
SEMI E128-0706E (editorial revision)
SEMI E128-0706 (technical revision)
SEMI E128-0304 (technical revision)
SEMI E128-0703 (first published)

Main Document:
SEMI E130-1104
Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published July 2003

This document establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this document is to facilitate the integration of prober equipment into an automated semiconductor factory.

This document accomplishes this by defining an operational model for prober equipment as viewed by a host. This definition provides a standard host interface and equipment operational behavior. The PSEM300 extends the generic Process State Model of SEMI E30 (GEM) with a Specific Process State model for prober equipment.

This standard attempts to be protocol independent. There is no attempt to replace the protocol dependent aspects of SEMI E30 (GEM). Instead, this document assumes that certain equipment features not covered within the concepts and behaviors of the related 300 mm standards will be supported using the concepts and behaviors defined within SEMI E30. See § 9 for a description of the SEMI E30 provisions. This document does not attempt to define the full set of equipment capabilities. It is understood that additional value-added features will be provided in addition to the requirements set forth in this document.

This document intends host-instructed indexing of sites within a substrate and the loading/unloading of the substrates. Automated self-indexing with such communications as GPIB or RS-232C between tester and prober equipment is outside the scope of this specification but is not precluded. See the Related Information section for reference.

This document does not describe much about recovery of exception or manual operation to recover from alarm / potential-alarm (warning) situations. Such conditions are usually configuration specific. This standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol.

Subordinate Document:
SEMI E130.1-1104
Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)

This document maps the services and data of SEMI E130 to SECS-II streams and functions, and data definitions. This is a specification covering equipment supporting automated communication of the prober equipment. This document applies to all implementations of SEMI E130 that use the SECS-II message protocol (SEMI E5). Compliance to this standard requires compliance to both SEMI E130 and SEMI E5.

Referenced SEMI Standards
SEMI E130
SEMI E5 — SEMI Equipment Communication Standard II Message Content (SECS II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Provisional Specification for Control Job Management
SEMI G81 — Specification for Map Data Items
SEMI G85 — Specification for Map Data Format
SEMI M20 — Specification for Establishing a Wafer Coordinate System
SEMI M21 — Specification for Assigning Addresses to Rectangular Elements in a Cartesian Array

SEMI E130.1
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High Speed SECS Message Services (HSMS) Generic Services
SEMI E123 — Handler Specific Equipment Model (HSEM)

Revision History
SEMI E130-1104 (designation update)
SEMI E130-1103 (first published)

SEMI E130.1-1104 (first published)

Main Document:
SEMI E132-1107
Specification for Equipment Client Authentication and Authorization

This specification was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published March 2004; previously published March 2007.

This specification describes a method for restricting access to communication with equipment by requiring clients to authenticate to the equipment before proceeding with subsequent communication, and provides a flexible authorization scheme to control client application access. Authorization allows parties who want to exchange information with or control the equipment to do so on a need-to-know and/or need-to-use basis.

The authorization scheme specified in this standard allows equipment vendor the flexibility to provide access control at any level of granularity, ranging from no access control restrictions, predefined role-based access control, to very fine-grained control.

This is a standard that applies to all semiconductor manufacturing equipment that requires authentication and authorization for its services. It does not apply to communication that is governed by the SEMI E30 communication and control state models.

This standard does not require data transmitted over an established session to be encrypted, encryption is only required as specified by the authentication protocol. It is assumed that the interface specified by this standard will be operating in an environment where there are no malicious attacks such as inside a closed factory network.

Subordinate Document:
SEMI E132.1-1107
Specifcation for SOAP Binding for Equipment Client Authentication and Authorization (ECA)

The purpose of this specification is to provide an authentication implementation using SSL and a WSDL/SOAP implementation and XML Schema that corresponds to the UML model for Equipment Client Authentication and Authorization as defined by SEMI E132.

The scope of this document is the faithful representation of the ECA model in an XML schema and corresponding WSDL services. It will not add new domain information or concepts to the model. The only additions made are those needed to render useful WSDL or XML Schema.

Referenced SEMI Standards
SEMI E132
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E128 — Specification for XML Message Structures

SEMI E132.1
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E128 — Specification for XML Message Structures
SEMI E132 — Specification for Equipment Client Authentication and Authorization

Revision History
SEMI E132-1107 (technical revision)
SEMI E132-0307 (technical revision)
SEMI E132-0306 (technical revision)
SEMI E132-1105 (technical revision)
SEMI E132-0305 (designation update)
SEMI E132-1104 (technical revision)
SEMI E132-0704 (technical revision)
SEMI E132-0304 (first published)

SEMI E132.1-1107 (technical revision)
SEMI E132.1-0307 (technical revision)
SEMI E132.1-0306 (technical revision)
SEMI E132.1-1105 (technical revision)
SEMI E132.1-0305 (first published)

Main Document:
SEMI E133-0708
Provisional Specification for Automated Process Control Systems Interface

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published March 2004; previously published November 2007.

In order to more efficiently facilitate the integration of Process Control Systems (PCS) such as run-to-run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for Process Control Systems that enable them to interact effectively and share data 1) among themselves and 2) with the other interdependent factory systems (including equipment data collection). This standard is intended for use by equipment suppliers, semiconductor manufacturers, equipment subsystem suppliers and control system suppliers who will utilize the PCS standards in future developed products.

This standard focuses on defining PCS capabilities, functional groups, and functional group interfaces. The standard is structured so that new functional groups can be added to the standard through future balloting. The components in this document include:
- Definitions of key terms and concepts pertinent to this domain,
- Description of the specification conventions used,
- Identification of the major functional groups within the scope of PCS,
- Description of the capabilities expected in each functional group (required and optional), and
- Definition of interfaces for these functional groups, including:
- Data that is available across these interfaces. This includes the interface data descriptions (inputs and outputs). Future enhancements to this specification will include detailed data structures in the form of inheritance and aggregation models that are common to all PCS functional groups, as well as specific models for each,
- Services supported and Interface behavior assumed, and
- Description of an approach for compliance verification testing.

The specific format and protocol implementation of these interface specifications, which are technology specific, will be delineated in supporting “dot” specifications to this standard. As an example a possible format is XML (which would include data type definitions and metamodel schemas).

In addition to the information embodied in this standard, the PCS TF will describe a validation process (prototyping) for the standard to identify and address real implementation issues as early as possible; results of this work will be included in future versions.

The provisional status of this specification will be removed when the following enhancements are added:
- Interface data structures and services specifications for the R2R, FD, FC, FP and SPC functional groups, and
- Additional compliance verification procedures for the R2R, FD, FC, FP and SPC functional groups.

Note that conformance with this standard as defined in § 10 is not enforceable until the complete data structures have been defined for at least one functional group.

Subordinate Document:
SEMI E133.1-1107
Provisional Specification for XML Messaging for Process Control Systems (PCS)

XML Implementation Mapping - The purpose of this specification is to provide an implementation mapping of the SEMI E133 specification for an Automated Process Control System Interface. This specification does not provide a transport protocol for communication of XML messages between client and server (Analysis Engines).

Specification Scope - This specification utilizes XML Schema definitions per W3C recommendations.

This specification provides XML Schema mapping of SEMI E133 PCS messages.

Referenced Standards:
SEMI E133
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Provisional Specification for Equipment Self Description (ESD)
SEMI E134 — Specification for Data Collection Management

SEMI E133.1
E133 — Provisional Specification for Automated Process Control Systems Interface

Revision History:
SEMI E133-0708 (technical revision)
SEMI E133-1107 (technical revision)
SEMI E133-0707 (technical revision)
SEMI E133-0307 (technical revision)
SEMI E133-0705 (technical revision)
SEMI E133-1104 (technical revision)
SEMI E133-0704 (technical revision)
SEMI E133-0304 (first published)

SEMI E133.1-1107 (technical revision)
SEMI E133.1-0306 (first published)

Main Document:
SEMI E134-0308
Specification for Data Collection Management

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published July 2004; previously published March 2005.

NOTICE: The designation of SEMI E134 was updated during the 0308 publishing cycle to reflect the changes made to SEMI E134.1.

This specification describes a method for data acquisition consumers to request process and operational data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources, and to allow consumers to organize related data into groups according to their purpose.

This specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan. This specification defines what form a data collection plan takes, the meaning of its contents, and an interface for managing them that is to be supported by the equipment.

This specification defines the behavior associated with the execution of data collection plans in the form of finite state machines. The formats for data produced as a result of executing a data collection plan are also defined, as is the interface that must be supported by consumers of data collection plan output.

This specification defines a way for the equipment to notify consumers when the combination of activities on the equipment, including data acquisition, are causing the equipment to perform below supplier-defined criteria.

This specification defines a way for consumers to make ad-hoc on-demand requests for data from the equipment, outside of a data collection plan.

Subordinate Document:
SEMI E134.1-0308
Specification for Soap Binding of Data Collection Management (DCM)

SOAP Implementation Mapping - The purpose of this specification is to provide an implementation mapping of the SEMI E134 specification for Data Collection Management to the SOAP 1.1 protocol. This document provides a description of the XML Schema data types used to support the UML classes defined in SEMI E134, and also describes the WSDL port type and binding definitions used to support the operations defined by the interfaces specified in SEMI E134.

Specification Scope - The scope of this specification is the faithful representation of the DCM model in an XML Schema and corresponding WSDL port types and bindings. It will not add new domain information or concepts to the SEMI E134 model. The only additions made are those needed to render useful WSDL or XML Schema.

This specification requires SEMI E132 authentication, and defines requirements for the application of SEMI E132 concepts to the SEMI E134 specification.

Referenced Standards:
SEMI E134
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Provisional Specification for Control Job Management

SEMI E134.1
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125.1 — Specification for SOAP Implementation of Equipment Self Description
SEMI E128 – Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components

Revision History:
SEMI E134-0308 (designation update)
SEMI E134-0307 (designation update)
SEMI E134-1105 (technical revision)
SEMI E134-0305 (designation update)
SEMI E134-1104E (editorial revision)
SEMI 134-0704 (first published)

SEMI E134.1-0308 (technical revision)
SEMI E134.1-0307 (technical revision)
SEMI E134.1-1105 (technical revision)
SEMI E134.1-0305 (first published)

This standard was technically approved by the Global Information & Control Committee and is the direct responsibility of the North American Information and Control Committee. Current edition approved by the North American Regional Standards Committee December 10, 2004. Initially available at www.semi.org January 2005; to be published March 2005.

This document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards.

This document currently defines the representation of Error. This common component is used in association with other XML documents or schemas generated as part of a SEMI standard interface specification for communication between software entities.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization

Revision History
SEMI E138-0305 (first published)

Main Document:
SEMI E139-0708
Specification for Recipe and Parameter Management (RaP)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published March 2005; previously published March 2008.

The purpose of this specification is to specify the cooperative interaction between the Factory Information & Control System (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).

This specification defines concepts, behavior, and services to support automated management of equipment recipes and related process definition elements within a semiconductor factory. It addresses the mechanisms for interaction between semiconductor equipment, recipe editors, and the Factory Information and Control System (FICS).

Subordinate Documents:
SEMI E139.1-0708
XML Schema for the RaP PDE

The purpose of this document is to define an XML-based format for transferring recipe components. This includes an XML schema that corresponds to the UML model for the RaP Process Definition Element (PDE) as defined by SEMI E139. In addition, an XML schema is defined for the Manifest that must be included in the TransferContainer with the PDE’s during transfer.

The scope of this document is the faithful representation of the PDE and Manifest definition from SEMI E139 in an XML schema. It will not add new domain information or concepts to the model. The only additions made are those needed to render a useful XML schema.

SEMI E139.2-0708
SECS-II Protocol for Recipe and Parameter Management (RaP)

This specification provides a mapping of the RaP communication services to the SECS-II protocol.

The scope of this specification is the accurate representation of RaP services as defined in SEMI E139 in SECS-II format. Excluded from the scope of this specification is the addition of new technical concepts except as needed to complete the mapping of SEMI E139 to SECS-II.

Referenced Standards:
SEMI E139
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E120 — Specification for the Common Equipment Module (CEM)

SEMI E139.1
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E139.2
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E139 — Recipe and Parameter Management (RaP)

Revision History:
SEMI E139-0708 (technical revision)
SEMI E139-0308 (technical revision)
SEMI E139-1107 (technical revision)
SEMI E139-1106E (editorial revision)
SEMI E139-1106 (technical revision)
SEMI E139-0706 (technical revision)
SEMI E139-0305 (first published)

SEMI E139.1-0708 (technical revision)
SEMI E139.1-0308 (technical revision)
SEMI E139.1-1106E (editorial revision)
SEMI E139.1-1106 (technical revision)
SEMI E139.1-0705 (first published)

SEMI E139.2-0708 (technical revision)
SEMI E139.2-1107 (technical revision)
SEMI E139.2-0706 (first published)

Main Document:
SEMI E142-0706
Specification for Substrate Mapping

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published March 2005; previously published March 2006.

This document defines the data items that are required to report, store and transmit map data for substrates such as wafers, frames, strips and trays.

This version of the document applies to the substrate types; wafers, frames, strips and trays.

This document addresses assembly and packaging including the testing of semiconductor devices.

Subordinate Documents:
SEMI E142.1 -0706
XML SCHEMA FOR SUBSTRATE MAPPING

The purpose of this specification is to provide an XML schema that corresponds to the data model for equipment defined by SEMI E142, Specification for Substrate Mapping. This schema is available to equipment communication standards that want to use SEMI E142 defined information in XML formatted equipment communication.

The scope of this document is the representation of the SEMI E142 object model in an XML schema. It will not add new domain information or concepts to the model. The only additions made are those needed to render a useful XML schema.

SEMI E142.2-0306
SECS II PROTOCOL FOR SUBSTRATE MAPPING

This document maps the services of SEMI E142 to SECS II Streams and Functions and data definitions.

This specification will identify the messages within the SECS/GEM message set used in the implementation of the substrate mapping services defined in SEMI E142. This specification applies to all implementations of SEMI E142 that use the SECS II message protocol (SEMI E5).The MapData parameter specified in the SEMI E142 services is a single variable that complies with the SEMI E142.1 XML Schema.

SEMI E142.3-0706
Web Services for Substrate Mapping

This standard is meant to facilitate software vendors, service providers, and/or semiconductor manufactures to offer a cohesive, interoperable set of tools for the transfer of substrate maps among semiconductor entities. This document maps the services of SEMI E142 to XML Web Services. The Web Services Definition Language (WSDL) representation of this standard is contained in a separate document.

This standard defines how to transmit substrate maps between semiconductor manufacturing sites.

This standard defines authentication and non-repudiation of the inter-site connection.

Referenced SEMI Standards
SEMI E142
SEMI E39 — Object Services Standard; Concept, Behavior and Services
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E142.1
SEMI E142 — Specification for Substrate Mapping
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

SEMI E142.2
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E142 — Specification for Substrate Mapping
SEMI E142.1 — XML Schema for Substrate Mapping
SEMI E30 — Generic Model for Communication and Control of Manufacturing Equipment (GEM) – Event Data Collection and Dynamic Event Report Configuration
SEMI E39 — Object Services Standard; Concept, Behavior and Services
SEMI E39.1 — SECS II Protocol for Object Services Standard (OSS)
SEMI E40 — Standard for Processing Management
SEMI E90 — Specification for Substrate Tracking

SEMI E142.3
SEMI E142 — Specification for Substrate Mapping
SEMI E142.1 — XML Schema for Substrate Mapping

Revision History
SEMI E142-0706 (technical revision)
SEMI E142-0306 (technical revision)
SEMI E142-1105 (technical revision)
SEMI E142-0305 (first published)

SEMI E142.1-0706 (technical revision)
SEMI E142.1-0306 (technical revision)
SEMI E142.1-1105 (technical revision)
SEMI E142.1-0705 (technical revision)
SEMI E142.1-0305 (fist published)

SEMI E142.2-0306 (first published)

SEMI E142.3-0706 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 16, 2006. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006.

The inclusion of Extensible Markup Language (XML) notation within current SEMI standards reflects the industry’s growing interest in XML technology. This standard defines the measurement units’ symbol representations in XML for the semiconductor industry based on units defined in SEMI E5, SEMI E6, and the International System of Units (SI). Its purpose is to provide a standardized set of symbols that represent common units for the semiconductor industry and to describe a method to add other symbols based on a standard approach using a common set of rules.

This standard defines measurement unit symbols and describes a common method to add more symbols for those units not included in this classification. It defines the unit object representation to be used in conjunction with other objects and provides its schema for representation in XML. A partial number of commonly used units and their symbols are also provided. This classification includes the following:
· Unit Object Definition
· Unit Classification Table Definitions
· Definition of Standardized Symbols
· Rules for Adding Other Unit Symbols

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E6 — Guide for Equipment Semiconductor Installation Documentation
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

Revision History
SEMI E145-0306 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007.

E This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to § 6.

This guide document provides additional information about the Equipment Data Acquisition (EDA) SEMI standards suite, explains the relationship among those standards, and presents basic concepts for implementation to ensure the EDA specifications are properly applied.

In-scope
This guide is applicable to semiconductor manufacturing equipment that implement the SEMI definition of the EDA interface for collecting equipment engineering data.

This guide includes the following:
- Overview of the EDA interface
- Overview of standards that make up the EDA interface
- Relationship among the EDA interface standards
- Guide for integrating and implementing the EDA standards

Out-of-scope
This guide standard does not describe or define any interface between systems outside the equipment.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI E116 — Specification for Equipment Performance Tracking (EPT)
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management (DCM)
SEMI E138 — XML Semiconductor Common components

Revision History
SEMI E147-0307E (editorial revision)
SEMI E147-0307 (first published)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007.

The purpose of this document is to define the requirements for any factory component computer clock that requires synchronization of time to maintain and manage date/time accurately and consistently by using a common time synchronization protocol.

It defines the TS-Clock object for accessing factory application and equipment time value and synchronization status, describes an example of network time synchronization architecture, and specifies which protocol to use for precise time synchronization of clocks in factory environments that use network communication.

The Network Time Protocol (NTPv3) protocol for time synchronization is specified in this document because it is applicable to systems communicating by local area networks supporting multicast messaging including but not limited to Ethernet. This protocol enables heterogeneous systems that include clocks of various inherent precision and stability to synchronize.

The time synchronization standard applies to factory components that collect, store, distribute, and process time-sensitive data. Factory components include applications used to manufacture devices, maintain equipment, provide process resources, condition the factory, control processes. In particular, it includes the equipment used in manufacturing.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard (OSS)
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E134 — Specification for Data Collection Management

Revision History
SEMI E148-0707 (first published)