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SEMI E004 - SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
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$75.00
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Latest revision: 0699 (Reapproved 0307)
SEMI E005 - SEMI Equipment Communications Standard 2 Message Content (SECS-II)
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$75.00
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$70.00
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Latest revision: 0708
SEMI E030 - Generic Model for Communications and Control of Manufacturing Equipment (GEM)
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$75.00
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$70.00
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Latest revision: 0307E
SEMI E030.01 - Inspection and Review Specific Equipment Model (ISEM)
List Price:
$75.00
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$70.00
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Latest revision: 1106
SEMI E030.05 - Specification for Metrology Specific Equipment Model (MSEM)
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$75.00
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$70.00
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Latest revision: 0302-0308R
SEMI E032 - Material Movement Management (MMM)
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$75.00
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$70.00
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Latest revision: 0997
SEMI E036 - Semiconductor Equipment Manufacturing Information Tagging Specification
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$75.00
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$70.00
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Latest revision: 0704
SEMI E037 - High-Speed SECS Message Services (HSMS) Generic Services
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$75.00
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$70.00
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Latest revision: 0308 (Reapproved 0708)
SEMI E038 - Cluster Tool Module Communications (CTMC)
List Price:
$75.00
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$70.00
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Latest revision: 1296 (Withdrawn 0307)
SEMI E039 - Object Services Standard: Concepts, Behavior, and Services
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$75.00
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$70.00
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Latest revision: 0703
SEMI E040 - Standard for Processing Management
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$75.00
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$70.00
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Latest revision: 1107
SEMI E041 - Exception Management (EM) Standard
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$75.00
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$70.00
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Latest revision: 95
SEMI E042 - Recipe Management Standard: Concepts, Behavior, and Message Services
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$75.00
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$70.00
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Latest revision: 0704
SEMI E053 - Event Reporting
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$75.00
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$70.00
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Latest revision: 0704
SEMI E054 - Sensor/Actuator Network Standard
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$75.00
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$70.00
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Latest revision: 0708
SEMI E054.03 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
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$75.00
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Latest revision:0698 (Reapproved 0704)
SEMI E054.04 - Standard for Sensor/Actuator Network Communications for DeviceNet
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$75.00
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$70.00
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Latest revision: 0704
SEMI E054.08 - Specification for Sensor/Actuator Network Communications for Profibus-DP
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$75.00
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$70.00
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Latest revision: 0305
SEMI E054.09 - Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP
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$75.00
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$70.00
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Latest revision: 0708
SEMI E054.10 - Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
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$75.00
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$70.00
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Latest revision:0600 (Reapproved 1106)
SEMI E054.11 - Specific Device Model for Endpoint Devices
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$75.00
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$70.00
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Latest revision: 1106
SEMI E054.12 - Specification for Sensor/Actuator Network Communications for CC-Link
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$75.00
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$70.00
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Latest revision: 0701E (Reapproved 1106)
SEMI E054.13 - Specification for Sensor/Actuator Network Communications for Ethernet/IP™
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$75.00
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$70.00
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Latest revision: 0303
SEMI E054.14 - Specification for Sensor/Actuator Network Communications for Profinet
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$75.00
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$70.00
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Latest revision: 0305
SEMI E054.15 - Sensor/Actuator Network Communication Specification for SafetyBUS p
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$75.00
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Latest revision: 1107
SEMI E054.16 - Specfication for Sensor/Actuator Network Communications for LONWORKS
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$75.00
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$70.00
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Latest revision: 1106
SEMI E054.17 - Specification of Sensor/Actuator Network for A-LINK
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$75.00
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$70.00
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Latest revision: 0706
SEMI E054.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum PumpDevice
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$75.00
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$70.00
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Latest revision: 1106
SEMI E054.19 - Specification for Sensor/Actuator Network for MECHATROLINK
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$75.00
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$70.00
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Latest revision: 0308
SEMI E054.20 - Standard for Sensor/Actuator Network Communications for EtherCAT
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$75.00
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$70.00
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Latest revision: 1107
SEMI E058 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
List Price:
$75.00
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$70.00
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Latest revision: 0703
SEMI E081 - Provisional Specification for CIM Framework Domain Architecture
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$75.00
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$70.00
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Latest revision: 0600 (Reapproved 0307)
SEMI E082 - Specification for Interbay/Intrabay AMHS SEM (IBSEM)
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$75.00
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$70.00
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Latest revision: 1106
SEMI E084 - Specification for Enhanced Carrier Handoff Parallel I/O Interface
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$75.00
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$70.00
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Latest revision: 1107
SEMI E086 - Provisional Specification for CIM Framework Factory Labor Component
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$75.00
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$70.00
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Latest revision: 0200
SEMI E087 - Specification for Carrier Management (CMS)
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$75.00
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$70.00
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Latest revision: 0707
SEMI E088 - Specification for AMHS Storage SEM (Stocker SEM)
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$75.00
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$70.00
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Latest revision: 0307
SEMI E090 - Specification for Substrate Tracking
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$75.00
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$70.00
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Latest revision: 0707
SEMI E091 - Specification for Prober Specific Equipment Model (PSEM)
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$75.00
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$70.00
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Latest revision: 0600
SEMI E094 - Specification for Control Job Management
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$75.00
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$70.00
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Latest revision: 0308
SEMI E095 - Specification for Human Interface for Semicondu
