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SEMI E001 - Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers
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List Price: $75.00
Our Price: $70.00
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Latest revision: 0697 (Reapproved 1102)E
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SEMI E001.09 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
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List Price: $75.00
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Latest revision: 1106E
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SEMI E006 - Guide for Semiconductor Equipment Installation Documentation
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List Price: $75.00
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Latest revision: 0303
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SEMI E007 - Specification for Electrical Interfaces for the U.S. Only
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List Price: $75.00
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Latest revision: 91 (Reapproved 1104)
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SEMI E010 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
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List Price: $75.00
Our Price: $70.00
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Latest revision: 0304E
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SEMI E012 - Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
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List Price: $75.00
Our Price: $70.00
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Latest revision: 0303
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SEMI E015 - Specification for Tool Load Port
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List Price: $75.00
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Latest revision: 0698E2 (Reapproved 0703)
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SEMI E015.01 - Specification for 300 mm Tool Load Port
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List Price: $75.00
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Latest revision: 0305
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SEMI E016 - Guideline for Determining and Describing Mass Flow Controller Leak Rates
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List Price: $75.00
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Latest revision: 90 (Reapproved 1104)
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SEMI E017 - Guideline for Mass Flow Controller Transient Characteristics Tests
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List Price: $75.00
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Latest revision: 0600 (Reapproved 0307)
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SEMI E018 - Guideline for Temperature Specifications of the Mass Flow Controller
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List Price: $75.00
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Latest revision: 91 (Reapproved 1104)
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SEMI E019 - Standard Mechanical Interface (SMIF)
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List Price: $75.00
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Latest revision: 1105
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SEMI E019.04 - 200 mm Standard Mechanical Interface (SMIF)
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List Price: $75.00
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Latest revision: 0998E (Reapproved 0703)
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SEMI E020 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard
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List Price: $75.00
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Latest revision: 0697 (Reapproved 1102)
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SEMI E021 - Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard
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List Price: $75.00
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Latest revision: 94 (Reapproved 1102)
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SEMI E022 - Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard
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List Price: $75.00
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Latest revision: 0697 (Reapproved 1102)
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SEMI E023 - Specification for Cassette Transfer Parallel I/O Interface
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List Price: $75.00
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Latest revision: 1104
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SEMI E024 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard
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List Price: $75.00
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Latest revision: 92 (Reapproved 0704)
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SEMI E027 - Standard for Mass Flow Controller and Mass Flow Meter Linearity
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List Price: $75.00
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Latest revision: 92 (Reapproved 1104)
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SEMI E028 - Guideline for Pressure Specifications of the Mass Flow Controller
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List Price: $75.00
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Latest revision: 92 (Reapproved 1104)
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SEMI E029 - Standard Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters
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List Price: $75.00
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Latest revision: 93 (Reapproved 1104)
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SEMI E031 - Specification for Electrical Interface, Japan Only
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List Price: $75.00
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Latest revision: 93
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SEMI E033 - Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility
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List Price: $75.00
Our Price: $70.00
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Latest revision: 94
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SEMI E034 - Guideline for Mass Flow Device Return
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List Price: $75.00
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Latest revision: 95
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SEMI E035 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
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List Price: $75.00
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Latest revision: 0307
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SEMI E043 - Guide for Measuring Static Charge on Objects and Surfaces
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List Price: $75.00
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Latest revision: 0301
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SEMI E045 - Test Method for the Determination of Inorganic Contamination from Minienvironments Using VPD-TXRF, VPD-AAS, or VPD/ICP-MS
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List Price: $75.00
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Latest revision: 1101 (Reapproved 0307)
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SEMI E046 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS)
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List Price: $75.00
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Latest revision: 0307
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SEMI E047 - Specification for 150 mm/200 mm Pod Handles
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List Price: $75.00
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Latest revision: 0301 (Reapproved 1106)
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SEMI E047.01 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
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List Price: $75.00
Our Price: $70.00
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Latest revision: 1106
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SEMI E048 - Specification for SMIF Indexer Volume Requirement
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List Price: $75.00
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Latest revision: 1101 (Reapproved 1107)
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SEMI E049 - Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
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List Price: $75.00
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Latest revision: 1104
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SEMI E051 - Guide for Typical Facilities Services and Termination Matrix
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List Price: $75.00
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Latest revision: 0200
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SEMI E052 - Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers
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List Price: $75.00
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Latest revision: 0308
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SEMI E056 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
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List Price: $75.00
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Latest revision: 1104
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SEMI E057 - Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
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List Price: $75.00
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Latest revision: 0600E2 (Reapproved 0305)
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SEMI E062 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
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List Price: $75.00
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Latest revision: 1106
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SEMI E063 - Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
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List Price: $75.00
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Latest revision: 1104
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SEMI E064 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
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List Price: $75.00
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Latest revision: 1105
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SEMI E066 - Test Method for Determining Particle Contribution by Mass Flow Controllers
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List Price: $75.00
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Latest revision: 1103
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