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SEMI C003 - Specifications for Gases
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List Price: $75.00
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Latest revision: 0699
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SEMI C003.02 - Specification for Arsine (AsH[3]) in Cylinders, 99.94% Quality
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List Price: $75.00
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Latest revision: 0301
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SEMI C003.06 - Standard for Phosphine (PH[3]) in Cylinders, 99.98% Quality
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List Price: $75.00
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Latest revision: 0701
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SEMI C003.12 - Specification for Ammonia (NH[3]) in Cylinders, 99.998% Quality
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List Price: $75.00
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Latest revision: 1102
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SEMI C003.20 - Standard for Helium (He) in Cylinders, 99.9995% Quality
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List Price: $75.00
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Latest revision: 92 (Reapproved 0999)
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SEMI C003.24 - Specification for Sulfur Hexafluoride (SF[6]) in Cylinders, 99.97% Quality
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List Price: $75.00
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Latest revision: 0301
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SEMI C003.26 - Specification for Tungsten Hexafluoride (WF[6]) in Cylinders, 99.8% Quality
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List Price: $75.00
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Latest revision: 0301
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SEMI C003.27 - Specification for Boron Trifluoride (BF[3]) in Cylinders, 99.0% Quality
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List Price: $75.00
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Latest revision: 1102
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SEMI C003.32 - Specification for Chlorine (Cl[2]), 99.996% Quality
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List Price: $75.00
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Latest revision: 0301
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SEMI C003.33 - Standard for Boron Trichloride (BCl[3]) (Provisional)
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List Price: $75.00
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Latest revision: 92 (Reapproved 0303)
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SEMI C003.34 - Specification for Disilane (Si[2]H[6]) in Cylinders, 97% Quality
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List Price: $75.00
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Latest revision: 1102
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SEMI C003.35 - Specification for Hydrogen Chloride (HCl), 99.997% Quality
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List Price: $75.00
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Latest revision: 1101
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SEMI C003.37 - Standard for Hexafluoroethane (C[2]F[6]), 99.97% Quality
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List Price: $75.00
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Latest revision: 0701
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SEMI C003.39 - Standard for Nitrogen Trifluoride (NF[3])
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List Price: $75.00
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Latest revision: 0304
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SEMI C003.40 - Standard for Carbon Tetrafluoride (CF[4]), VLSI Grade
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List Price: $75.00
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Latest revision: 1000
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SEMI C003.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality
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List Price: $75.00
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Latest revision: 1101
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SEMI C003.51 - Specification for Boron Trichloride (BCl[3]), 99.98% Quality
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List Price: $75.00
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Latest revision: 1101
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SEMI C003.52 - Standard for Tungsten Hexafluoride, 99.996% Quality
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List Price: $75.00
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Latest revision: 0200
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SEMI C003.54 - Gas Purity Guideline for Silane (SiH[4])
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List Price: $75.00
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Latest revision: 0200E
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SEMI C003.55 - Standard for Silane (SiH[4]), Bulk
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List Price: $75.00
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Latest revision: 0200
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SEMI C003.56 - Specification for Diborane Mixtures
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List Price: $75.00
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Latest revision: 0600
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SEMI C003.57 - Specification for Carbon Dioxide, CO[2], Electronic Grade in Cylinders
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List Price: $75.00
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Latest revision: 0600
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SEMI C003.58 - Specification for Octafluorocyclobutane, C[4]F[8], Electronic Grade in Cylinders
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List Price: $75.00
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Latest revision: 0303
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SEMI C006.02 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
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List Price: $75.00
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Latest revision: 93 (Reapproved 1102)
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SEMI C006.03 - Particle Specification for Grade 20/0.2 Hydrogen (H[2]) Delivered as Pipeline Gas
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List Price: $75.00
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Latest revision: 89 (Reapproved 0303)
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SEMI C006.04 - Particle Specification for Grade 20/0.02 Nitrogen (N[2]) and Argon (Ar) Delivered as Pipeline Gas
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List Price: $75.00
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Latest revision: 90 (Reapproved 1102)
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SEMI C006.05 - Particle Specification for Grade 10/0.2 Nitrogen (N[2]) and Argon (Ar) Delivered as Pipeline Gas
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List Price: $75.00
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Latest revision: 90 (Reapproved 1102)
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SEMI C006.06 - Particle Specification for Grade 10/0.1 Nitrogen (N[2]) and Argon (Ar) Delivered as Pipeline Gas
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List Price: $75.00
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Latest revision: 90 (Reapproved 1102)
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SEMI C006.07 - Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
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List Price: $75.00
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Latest revision: 93 (Reapproved 1102)
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SEMI C009.01 - Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
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List Price: $75.00
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Latest revision: 93 (Reapproved 1102)
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SEMI C010 - Guide for Determination of Method Detection Limits
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List Price: $75.00
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Latest revision: 0305
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SEMI C014 - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
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List Price: $75.00
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Latest revision: 95 (Reapproved 1102)
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SEMI C015 - Test Method for ppm and ppb Humidity Standards
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List Price: $75.00
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Latest revision: 95 (Reapproved 1102)
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SEMI C052 - Specification for the Shelf Life of a Specialty Gas
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List Price: $75.00
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Latest revision: 0301
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SEMI C054 - Specifications and Guidelines for Oxygen
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List Price: $75.00
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Latest revision: 1103
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SEMI C055 - Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality
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Latest revision: 1104
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SEMI C056 - Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
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List Price: $75.00
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Latest revision: 0305
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SEMI C057 - Specifications and Guidelines for Argon
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List Price: $75.00
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Latest revision: 0305
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SEMI C058 - Specifications and Guidelines for Hydrogen
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Latest revision: 0305
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SEMI C059 - Specifications and Guidelines for Nitrogen
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List Price: $75.00
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Latest revision: 1104
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